JPH0295232U - - Google Patents

Info

Publication number
JPH0295232U
JPH0295232U JP398389U JP398389U JPH0295232U JP H0295232 U JPH0295232 U JP H0295232U JP 398389 U JP398389 U JP 398389U JP 398389 U JP398389 U JP 398389U JP H0295232 U JPH0295232 U JP H0295232U
Authority
JP
Japan
Prior art keywords
lower cup
cup
spin chuck
wafer
skirt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP398389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP398389U priority Critical patent/JPH0295232U/ja
Publication of JPH0295232U publication Critical patent/JPH0295232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP398389U 1989-01-18 1989-01-18 Pending JPH0295232U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP398389U JPH0295232U (US20110009641A1-20110113-C00185.png) 1989-01-18 1989-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP398389U JPH0295232U (US20110009641A1-20110113-C00185.png) 1989-01-18 1989-01-18

Publications (1)

Publication Number Publication Date
JPH0295232U true JPH0295232U (US20110009641A1-20110113-C00185.png) 1990-07-30

Family

ID=31206098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP398389U Pending JPH0295232U (US20110009641A1-20110113-C00185.png) 1989-01-18 1989-01-18

Country Status (1)

Country Link
JP (1) JPH0295232U (US20110009641A1-20110113-C00185.png)

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