JPH0291907U - - Google Patents
Info
- Publication number
- JPH0291907U JPH0291907U JP76889U JP76889U JPH0291907U JP H0291907 U JPH0291907 U JP H0291907U JP 76889 U JP76889 U JP 76889U JP 76889 U JP76889 U JP 76889U JP H0291907 U JPH0291907 U JP H0291907U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- film
- shielding plate
- rotating shaft
- light shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図はこの考案の一実施例を示す概略構成図
、第２図はレーザビームの走査部を示す拡大図、
第３図は従来の膜厚測定装置を示す概略構成図、
第４図は従来の装置におけるレーザビームの走査
部を示す拡大図である。
図において、１は回転軸、２は被測定部材、３
は遮光板、４，５はレーザ光発生器、６は反射ミ
ラー、７，８，９，１０はレンズ、１１，１２は
受光器、１７，１８はシリンドリカルレンズであ
る。なお、図中、同一符号は同一又は相当部分を
示す。
Fig. 1 is a schematic configuration diagram showing an embodiment of this invention, Fig. 2 is an enlarged view showing the scanning section of the laser beam,
Figure 3 is a schematic configuration diagram showing a conventional film thickness measuring device;
FIG. 4 is an enlarged view showing a laser beam scanning section in a conventional device. In the figure, 1 is the rotation axis, 2 is the member to be measured, and 3
1 is a light shielding plate, 4 and 5 are laser beam generators, 6 is a reflecting mirror, 7, 8, 9, and 10 are lenses, 11 and 12 are light receivers, and 17 and 18 are cylindrical lenses. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
にされた回転軸及びこの回転軸と所定の間隔を介
して対向し、上記回転軸の長手方向に延在する遮
光板を備え、上記被測定膜と遮光板との間でレー
ザ光を走査することにより上記被測定膜の膜厚を
測定するようにしたものにおいて、上記レーザ光
を走査方向にのみ集光し、上記遮光板の位置にお
いて走査方向を短軸とする楕円形に結像するよう
にしたことを特徴とする膜厚測定装置。 The film to be measured is provided with a rotating shaft configured to closely support and feed the film to be measured, and a light-shielding plate facing the rotating shaft at a predetermined distance and extending in the longitudinal direction of the rotating shaft; The thickness of the film to be measured is measured by scanning a laser beam between the light shielding plate and the light shielding plate. A film thickness measuring device characterized by forming an image in an elliptical shape with a short axis of .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP76889U JPH0291907U (en) | 1989-01-07 | 1989-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP76889U JPH0291907U (en) | 1989-01-07 | 1989-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291907U true JPH0291907U (en) | 1990-07-20 |
Family
ID=31200081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP76889U Pending JPH0291907U (en) | 1989-01-07 | 1989-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291907U (en) |
-
1989
- 1989-01-07 JP JP76889U patent/JPH0291907U/ja active Pending
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