JPH0291336U - - Google Patents

Info

Publication number
JPH0291336U
JPH0291336U JP17070488U JP17070488U JPH0291336U JP H0291336 U JPH0291336 U JP H0291336U JP 17070488 U JP17070488 U JP 17070488U JP 17070488 U JP17070488 U JP 17070488U JP H0291336 U JPH0291336 U JP H0291336U
Authority
JP
Japan
Prior art keywords
wafer
wafer holder
vapor phase
phase growth
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17070488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17070488U priority Critical patent/JPH0291336U/ja
Publication of JPH0291336U publication Critical patent/JPH0291336U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP17070488U 1988-12-29 1988-12-29 Pending JPH0291336U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17070488U JPH0291336U (US06826419-20041130-M00005.png) 1988-12-29 1988-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17070488U JPH0291336U (US06826419-20041130-M00005.png) 1988-12-29 1988-12-29

Publications (1)

Publication Number Publication Date
JPH0291336U true JPH0291336U (US06826419-20041130-M00005.png) 1990-07-19

Family

ID=31461881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17070488U Pending JPH0291336U (US06826419-20041130-M00005.png) 1988-12-29 1988-12-29

Country Status (1)

Country Link
JP (1) JPH0291336U (US06826419-20041130-M00005.png)

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