JPH0290844U - - Google Patents

Info

Publication number
JPH0290844U
JPH0290844U JP17020888U JP17020888U JPH0290844U JP H0290844 U JPH0290844 U JP H0290844U JP 17020888 U JP17020888 U JP 17020888U JP 17020888 U JP17020888 U JP 17020888U JP H0290844 U JPH0290844 U JP H0290844U
Authority
JP
Japan
Prior art keywords
chemical liquid
tank
cup
sub
liquid sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17020888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058606Y2 (US06521211-20030218-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988170208U priority Critical patent/JPH058606Y2/ja
Publication of JPH0290844U publication Critical patent/JPH0290844U/ja
Application granted granted Critical
Publication of JPH058606Y2 publication Critical patent/JPH058606Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988170208U 1988-12-30 1988-12-30 Expired - Lifetime JPH058606Y2 (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988170208U JPH058606Y2 (US06521211-20030218-C00004.png) 1988-12-30 1988-12-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988170208U JPH058606Y2 (US06521211-20030218-C00004.png) 1988-12-30 1988-12-30

Publications (2)

Publication Number Publication Date
JPH0290844U true JPH0290844U (US06521211-20030218-C00004.png) 1990-07-18
JPH058606Y2 JPH058606Y2 (US06521211-20030218-C00004.png) 1993-03-03

Family

ID=31460954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988170208U Expired - Lifetime JPH058606Y2 (US06521211-20030218-C00004.png) 1988-12-30 1988-12-30

Country Status (1)

Country Link
JP (1) JPH058606Y2 (US06521211-20030218-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119532A (ja) * 1986-11-07 1988-05-24 Mitsubishi Electric Corp 半導体製造におけるフオトレジスト塗布および現像装置
JPS63152123A (ja) * 1986-12-17 1988-06-24 Tokyo Electron Ltd 浸漬式の液処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119532A (ja) * 1986-11-07 1988-05-24 Mitsubishi Electric Corp 半導体製造におけるフオトレジスト塗布および現像装置
JPS63152123A (ja) * 1986-12-17 1988-06-24 Tokyo Electron Ltd 浸漬式の液処理装置

Also Published As

Publication number Publication date
JPH058606Y2 (US06521211-20030218-C00004.png) 1993-03-03

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