JPH0282042U - - Google Patents
Info
- Publication number
- JPH0282042U JPH0282042U JP16285888U JP16285888U JPH0282042U JP H0282042 U JPH0282042 U JP H0282042U JP 16285888 U JP16285888 U JP 16285888U JP 16285888 U JP16285888 U JP 16285888U JP H0282042 U JPH0282042 U JP H0282042U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- container
- vent hole
- storage container
- case body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 2
- 239000004743 Polypropylene Substances 0.000 claims 1
- 239000002274 desiccant Substances 0.000 claims 1
- -1 polypropylene Polymers 0.000 claims 1
- 229920001155 polypropylene Polymers 0.000 claims 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988162858U JP2517936Y2 (ja) | 1988-12-15 | 1988-12-15 | フォトマスク又はフォトマスク用基板の収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988162858U JP2517936Y2 (ja) | 1988-12-15 | 1988-12-15 | フォトマスク又はフォトマスク用基板の収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0282042U true JPH0282042U (US06330241-20011211-M00004.png) | 1990-06-25 |
| JP2517936Y2 JP2517936Y2 (ja) | 1996-11-20 |
Family
ID=31447069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988162858U Expired - Lifetime JP2517936Y2 (ja) | 1988-12-15 | 1988-12-15 | フォトマスク又はフォトマスク用基板の収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2517936Y2 (US06330241-20011211-M00004.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007091296A (ja) * | 2005-09-29 | 2007-04-12 | Hoya Corp | マスクブランク収納容器、マスクブランクの収納方法及びマスクブランク収納体 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6290381U (US06330241-20011211-M00004.png) * | 1985-11-26 | 1987-06-09 | ||
| JPS6334273U (US06330241-20011211-M00004.png) * | 1986-04-07 | 1988-03-05 |
-
1988
- 1988-12-15 JP JP1988162858U patent/JP2517936Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6290381U (US06330241-20011211-M00004.png) * | 1985-11-26 | 1987-06-09 | ||
| JPS6334273U (US06330241-20011211-M00004.png) * | 1986-04-07 | 1988-03-05 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007091296A (ja) * | 2005-09-29 | 2007-04-12 | Hoya Corp | マスクブランク収納容器、マスクブランクの収納方法及びマスクブランク収納体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2517936Y2 (ja) | 1996-11-20 |
