JPH0282032U - - Google Patents

Info

Publication number
JPH0282032U
JPH0282032U JP16288688U JP16288688U JPH0282032U JP H0282032 U JPH0282032 U JP H0282032U JP 16288688 U JP16288688 U JP 16288688U JP 16288688 U JP16288688 U JP 16288688U JP H0282032 U JPH0282032 U JP H0282032U
Authority
JP
Japan
Prior art keywords
load lock
boat
wafers
preliminary chamber
lock chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16288688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517879Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16288688U priority Critical patent/JPH0517879Y2/ja
Publication of JPH0282032U publication Critical patent/JPH0282032U/ja
Application granted granted Critical
Publication of JPH0517879Y2 publication Critical patent/JPH0517879Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP16288688U 1988-12-14 1988-12-14 Expired - Lifetime JPH0517879Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16288688U JPH0517879Y2 (cs) 1988-12-14 1988-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16288688U JPH0517879Y2 (cs) 1988-12-14 1988-12-14

Publications (2)

Publication Number Publication Date
JPH0282032U true JPH0282032U (cs) 1990-06-25
JPH0517879Y2 JPH0517879Y2 (cs) 1993-05-13

Family

ID=31447121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16288688U Expired - Lifetime JPH0517879Y2 (cs) 1988-12-14 1988-12-14

Country Status (1)

Country Link
JP (1) JPH0517879Y2 (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04137613A (ja) * 1990-09-28 1992-05-12 Handotai Process Kenkyusho:Kk 半導体装置の製造装置
JPH04188721A (ja) * 1990-11-22 1992-07-07 Tokyo Electron Ltd 縦型熱処理装置
JPH05198659A (ja) * 1992-01-22 1993-08-06 Tokyo Ohka Kogyo Co Ltd プラズマ処理装置
JPH0883831A (ja) * 1994-09-13 1996-03-26 Nec Corp 半導体装置の製造装置
WO1996024949A1 (en) * 1995-02-10 1996-08-15 Tokyo Electron Limited Heat treatment method and apparatus
JPH1092906A (ja) * 1996-09-05 1998-04-10 Samsung Electron Co Ltd 半導体ウェーハ熱処理装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04137613A (ja) * 1990-09-28 1992-05-12 Handotai Process Kenkyusho:Kk 半導体装置の製造装置
JPH04188721A (ja) * 1990-11-22 1992-07-07 Tokyo Electron Ltd 縦型熱処理装置
JPH05198659A (ja) * 1992-01-22 1993-08-06 Tokyo Ohka Kogyo Co Ltd プラズマ処理装置
JPH0883831A (ja) * 1994-09-13 1996-03-26 Nec Corp 半導体装置の製造装置
WO1996024949A1 (en) * 1995-02-10 1996-08-15 Tokyo Electron Limited Heat treatment method and apparatus
US6322631B1 (en) 1995-02-10 2001-11-27 Tokyo Electron Limited Heat treatment method and its apparatus
JPH1092906A (ja) * 1996-09-05 1998-04-10 Samsung Electron Co Ltd 半導体ウェーハ熱処理装置

Also Published As

Publication number Publication date
JPH0517879Y2 (cs) 1993-05-13

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