JPH0281660U - - Google Patents

Info

Publication number
JPH0281660U
JPH0281660U JP15824488U JP15824488U JPH0281660U JP H0281660 U JPH0281660 U JP H0281660U JP 15824488 U JP15824488 U JP 15824488U JP 15824488 U JP15824488 U JP 15824488U JP H0281660 U JPH0281660 U JP H0281660U
Authority
JP
Japan
Prior art keywords
ultrasonic
ultrasonic sprayer
thin film
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15824488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15824488U priority Critical patent/JPH0281660U/ja
Publication of JPH0281660U publication Critical patent/JPH0281660U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Special Spraying Apparatus (AREA)
JP15824488U 1988-12-05 1988-12-05 Pending JPH0281660U (US08118993-20120221-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15824488U JPH0281660U (US08118993-20120221-C00002.png) 1988-12-05 1988-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15824488U JPH0281660U (US08118993-20120221-C00002.png) 1988-12-05 1988-12-05

Publications (1)

Publication Number Publication Date
JPH0281660U true JPH0281660U (US08118993-20120221-C00002.png) 1990-06-25

Family

ID=31438395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15824488U Pending JPH0281660U (US08118993-20120221-C00002.png) 1988-12-05 1988-12-05

Country Status (1)

Country Link
JP (1) JPH0281660U (US08118993-20120221-C00002.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613885A (ja) * 1984-06-18 1986-01-09 Taiyo Yuden Co Ltd 霧化薄膜作製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613885A (ja) * 1984-06-18 1986-01-09 Taiyo Yuden Co Ltd 霧化薄膜作製方法

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