JPH0279022U - - Google Patents

Info

Publication number
JPH0279022U
JPH0279022U JP15957588U JP15957588U JPH0279022U JP H0279022 U JPH0279022 U JP H0279022U JP 15957588 U JP15957588 U JP 15957588U JP 15957588 U JP15957588 U JP 15957588U JP H0279022 U JPH0279022 U JP H0279022U
Authority
JP
Japan
Prior art keywords
thin film
film sheet
exposure
exposure assembly
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15957588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15957588U priority Critical patent/JPH0279022U/ja
Publication of JPH0279022U publication Critical patent/JPH0279022U/ja
Pending legal-status Critical Current

Links

JP15957588U 1988-12-08 1988-12-08 Pending JPH0279022U (US08197722-20120612-C00093.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15957588U JPH0279022U (US08197722-20120612-C00093.png) 1988-12-08 1988-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15957588U JPH0279022U (US08197722-20120612-C00093.png) 1988-12-08 1988-12-08

Publications (1)

Publication Number Publication Date
JPH0279022U true JPH0279022U (US08197722-20120612-C00093.png) 1990-06-18

Family

ID=31440910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15957588U Pending JPH0279022U (US08197722-20120612-C00093.png) 1988-12-08 1988-12-08

Country Status (1)

Country Link
JP (1) JPH0279022U (US08197722-20120612-C00093.png)

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