JPH0278947U - - Google Patents

Info

Publication number
JPH0278947U
JPH0278947U JP15872288U JP15872288U JPH0278947U JP H0278947 U JPH0278947 U JP H0278947U JP 15872288 U JP15872288 U JP 15872288U JP 15872288 U JP15872288 U JP 15872288U JP H0278947 U JPH0278947 U JP H0278947U
Authority
JP
Japan
Prior art keywords
copy
chamber
substrate
back side
mask substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15872288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15872288U priority Critical patent/JPH0278947U/ja
Publication of JPH0278947U publication Critical patent/JPH0278947U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
JP15872288U 1988-12-06 1988-12-06 Pending JPH0278947U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15872288U JPH0278947U (US20080293856A1-20081127-C00150.png) 1988-12-06 1988-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15872288U JPH0278947U (US20080293856A1-20081127-C00150.png) 1988-12-06 1988-12-06

Publications (1)

Publication Number Publication Date
JPH0278947U true JPH0278947U (US20080293856A1-20081127-C00150.png) 1990-06-18

Family

ID=31439304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15872288U Pending JPH0278947U (US20080293856A1-20081127-C00150.png) 1988-12-06 1988-12-06

Country Status (1)

Country Link
JP (1) JPH0278947U (US20080293856A1-20081127-C00150.png)

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