JPH0275748U - - Google Patents

Info

Publication number

JPH0275748U

JPH0275748U JP15575488U JP15575488U JPH0275748U JP H0275748 U JPH0275748 U JP H0275748U JP 15575488 U JP15575488 U JP 15575488U JP 15575488 U JP15575488 U JP 15575488U JP H0275748 U JPH0275748 U JP H0275748U

Authority

JP

Japan

Prior art keywords

capacitive

aperture

integrated circuit

capacitive aperture

laminated

Prior art date

1988-11-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000003990 capacitor Substances 0.000 description 3
• 238000010586 diagram Methods 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 238000002955 isolation Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1