JPH0275730U - - Google Patents

Info

Publication number

JPH0275730U

JPH0275730U JP15508688U JP15508688U JPH0275730U JP H0275730 U JPH0275730 U JP H0275730U JP 15508688 U JP15508688 U JP 15508688U JP 15508688 U JP15508688 U JP 15508688U JP H0275730 U JPH0275730 U JP H0275730U

Authority

JP

Japan

Prior art keywords

wafer

wafer holder

transfer device

holder

piezoelectric element

Prior art date

1988-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000000452 restraining effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000006073 displacement reaction Methods 0.000 description 1

Cited By (2)