JPH0274815A - Interval measuring apparatus - Google Patents

Interval measuring apparatus

Info

Publication number
JPH0274815A
JPH0274815A JP63226004A JP22600488A JPH0274815A JP H0274815 A JPH0274815 A JP H0274815A JP 63226004 A JP63226004 A JP 63226004A JP 22600488 A JP22600488 A JP 22600488A JP H0274815 A JPH0274815 A JP H0274815A
Authority
JP
Japan
Prior art keywords
moved
luminous flux
incident
incident position
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63226004A
Other languages
Japanese (ja)
Other versions
JP2556559B2 (en
Inventor
Tetsushi Nose
Naoto Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP63226004A priority Critical patent/JP2556559B2/en
Priority claimed from EP19890301477 external-priority patent/EP0336537B1/en
Publication of JPH0274815A publication Critical patent/JPH0274815A/en
Priority claimed from US07/919,380 external-priority patent/US5327221A/en
Application granted granted Critical
Publication of JP2556559B2 publication Critical patent/JP2556559B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric

Abstract

PURPOSE: To make it possible to perform highly accurate interval measurement all the time by using two luminous fluxes whose incident positions are equally moved when a first body and second body are relatively moved in the direction perpendicular to the direction of the interval, and whose incident positions are moved when the bodies are relatively moved in the facing direction, and measuring the interval.
CONSTITUTION: A first photodetecting means 4 detects the incident position of a first luminous flux 1. The incident position into a first light receiving surface is changed. A second photodetecting means detects the incident position of a second luminous flux. The incident position into a second light receiving surface is moved differently from that of the first luminous flux. The incident position of the second luminous flux into the second light receiving position is moved equally as the first luminous flux in correspondence with the change in relative position along the direction perpendicular to the facing direction. A means which detects the change in relative position of the first and second bodies 2 and 3 in the facing direction based on the results of the detection of the first and second photodetecting means is provided. In this way, the highly accurate interval measurement can be performed without the effect of the inclination of a wafer and the like.
COPYRIGHT: (C)1990,JPO&Japio
JP63226004A 1988-09-09 1988-09-09 Interval measuring device Expired - Fee Related JP2556559B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63226004A JP2556559B2 (en) 1988-09-09 1988-09-09 Interval measuring device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP63226004A JP2556559B2 (en) 1988-09-09 1988-09-09 Interval measuring device
EP19890301477 EP0336537B1 (en) 1988-02-16 1989-02-16 Device for detecting positional relationship between two objects
DE1989625142 DE68925142T2 (en) 1988-02-16 1989-02-16 Device for proving the local relationship between two objects
US07/919,380 US5327221A (en) 1988-02-16 1992-07-29 Device for detecting positional relationship between two objects

Publications (2)

Publication Number Publication Date
JPH0274815A true JPH0274815A (en) 1990-03-14
JP2556559B2 JP2556559B2 (en) 1996-11-20

Family

ID=16838279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63226004A Expired - Fee Related JP2556559B2 (en) 1988-09-09 1988-09-09 Interval measuring device

Country Status (1)

Country Link
JP (1) JP2556559B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183608A (en) * 1992-01-03 1993-02-02 Corning Incorporated Method of making diesel particulate filters
EP3070067A1 (en) 2015-03-20 2016-09-21 NGK Insulators, Ltd. Method for manufacturing plugged honeycomb structure, and plugged honeycomb structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183608A (en) * 1992-01-03 1993-02-02 Corning Incorporated Method of making diesel particulate filters
EP3070067A1 (en) 2015-03-20 2016-09-21 NGK Insulators, Ltd. Method for manufacturing plugged honeycomb structure, and plugged honeycomb structure

Also Published As

Publication number Publication date
JP2556559B2 (en) 1996-11-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees