JPH0274362U - - Google Patents

Info

Publication number
JPH0274362U
JPH0274362U JP15123788U JP15123788U JPH0274362U JP H0274362 U JPH0274362 U JP H0274362U JP 15123788 U JP15123788 U JP 15123788U JP 15123788 U JP15123788 U JP 15123788U JP H0274362 U JPH0274362 U JP H0274362U
Authority
JP
Japan
Prior art keywords
tray
pair
support parts
light receiving
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15123788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15123788U priority Critical patent/JPH0274362U/ja
Publication of JPH0274362U publication Critical patent/JPH0274362U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15123788U 1988-11-22 1988-11-22 Pending JPH0274362U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15123788U JPH0274362U (enrdf_load_stackoverflow) 1988-11-22 1988-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15123788U JPH0274362U (enrdf_load_stackoverflow) 1988-11-22 1988-11-22

Publications (1)

Publication Number Publication Date
JPH0274362U true JPH0274362U (enrdf_load_stackoverflow) 1990-06-06

Family

ID=31425101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15123788U Pending JPH0274362U (enrdf_load_stackoverflow) 1988-11-22 1988-11-22

Country Status (1)

Country Link
JP (1) JPH0274362U (enrdf_load_stackoverflow)

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