JPH027432U - - Google Patents

Info

Publication number

JPH027432U

JPH027432U JP8283088U JP8283088U JPH027432U JP H027432 U JPH027432 U JP H027432U JP 8283088 U JP8283088 U JP 8283088U JP 8283088 U JP8283088 U JP 8283088U JP H027432 U JPH027432 U JP H027432U

Authority

JP

Japan

Prior art keywords

processing chamber

chamber

wall

heat

exhaust passage

Prior art date

1988-06-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 238000010171 animal model Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1