JPH0269935A - Method for etching tungsten - Google Patents

Method for etching tungsten

Info

Publication number
JPH0269935A
JPH0269935A JP22180288A JP22180288A JPH0269935A JP H0269935 A JPH0269935 A JP H0269935A JP 22180288 A JP22180288 A JP 22180288A JP 22180288 A JP22180288 A JP 22180288A JP H0269935 A JPH0269935 A JP H0269935A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
gas
etching
tungsten
film
etching gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22180288A
Inventor
Moritaka Nakamura
Tsutomu Saito
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To obtain a tungsten pattern having a base film, a high selection ratio and an anisotropic shape faithful for a mask by reactive ion etching with etching gas having a predetermined mixture ratio.
CONSTITUTION: When tungsten is reactively ion etched, etching gas in which hydrogen sulfide is added to the fluorine gas of main etching gas is employed. The mixture ratio of the hydrogen sulfide gas is set to 10-25% to the total flow rate of the mixture gas. The reactive ion etching is conducted with the etching gas. As a result, a tungsten pattern 2A of anisotropic shape faithfully matched to a mask pattern 3 with extremely small undercut can be easily formed with low ion energy having sufficiently etching selectively with a base insulating film 1 without damaging the film 1.
COPYRIGHT: (C)1990,JPO&Japio
JP22180288A 1988-09-05 1988-09-05 Method for etching tungsten Pending JPH0269935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22180288A JPH0269935A (en) 1988-09-05 1988-09-05 Method for etching tungsten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22180288A JPH0269935A (en) 1988-09-05 1988-09-05 Method for etching tungsten

Publications (1)

Publication Number Publication Date
JPH0269935A true true JPH0269935A (en) 1990-03-08

Family

ID=16772426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22180288A Pending JPH0269935A (en) 1988-09-05 1988-09-05 Method for etching tungsten

Country Status (1)

Country Link
JP (1) JPH0269935A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5774214A (en) * 1996-12-12 1998-06-30 Photometrics, Ltd. Multi-mode imaging apparatus for radiation-emitting or absorbing samples

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5774214A (en) * 1996-12-12 1998-06-30 Photometrics, Ltd. Multi-mode imaging apparatus for radiation-emitting or absorbing samples

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