JPH0267644U - - Google Patents

Info

Publication number
JPH0267644U
JPH0267644U JP14678188U JP14678188U JPH0267644U JP H0267644 U JPH0267644 U JP H0267644U JP 14678188 U JP14678188 U JP 14678188U JP 14678188 U JP14678188 U JP 14678188U JP H0267644 U JPH0267644 U JP H0267644U
Authority
JP
Japan
Prior art keywords
carrier
support
support columns
pedestal
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14678188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648850Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14678188U priority Critical patent/JPH0648850Y2/ja
Publication of JPH0267644U publication Critical patent/JPH0267644U/ja
Application granted granted Critical
Publication of JPH0648850Y2 publication Critical patent/JPH0648850Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP14678188U 1988-11-09 1988-11-09 キャリヤピッチ変換装置 Expired - Lifetime JPH0648850Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14678188U JPH0648850Y2 (ja) 1988-11-09 1988-11-09 キャリヤピッチ変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14678188U JPH0648850Y2 (ja) 1988-11-09 1988-11-09 キャリヤピッチ変換装置

Publications (2)

Publication Number Publication Date
JPH0267644U true JPH0267644U (US07714131-20100511-C00024.png) 1990-05-22
JPH0648850Y2 JPH0648850Y2 (ja) 1994-12-12

Family

ID=31416589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14678188U Expired - Lifetime JPH0648850Y2 (ja) 1988-11-09 1988-11-09 キャリヤピッチ変換装置

Country Status (1)

Country Link
JP (1) JPH0648850Y2 (US07714131-20100511-C00024.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
JPH0634251U (ja) * 1992-10-13 1994-05-06 株式会社ディスコエンジニアリングサービス フレーム挿入補助治具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
JPH0634251U (ja) * 1992-10-13 1994-05-06 株式会社ディスコエンジニアリングサービス フレーム挿入補助治具

Also Published As

Publication number Publication date
JPH0648850Y2 (ja) 1994-12-12

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