JPH0267633U - - Google Patents

Info

Publication number
JPH0267633U
JPH0267633U JP14663188U JP14663188U JPH0267633U JP H0267633 U JPH0267633 U JP H0267633U JP 14663188 U JP14663188 U JP 14663188U JP 14663188 U JP14663188 U JP 14663188U JP H0267633 U JPH0267633 U JP H0267633U
Authority
JP
Japan
Prior art keywords
magnetic field
sample
processing
processing chamber
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14663188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14663188U priority Critical patent/JPH0267633U/ja
Publication of JPH0267633U publication Critical patent/JPH0267633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14663188U 1988-11-11 1988-11-11 Pending JPH0267633U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14663188U JPH0267633U (US20100012521A1-20100121-C00001.png) 1988-11-11 1988-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14663188U JPH0267633U (US20100012521A1-20100121-C00001.png) 1988-11-11 1988-11-11

Publications (1)

Publication Number Publication Date
JPH0267633U true JPH0267633U (US20100012521A1-20100121-C00001.png) 1990-05-22

Family

ID=31416301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14663188U Pending JPH0267633U (US20100012521A1-20100121-C00001.png) 1988-11-11 1988-11-11

Country Status (1)

Country Link
JP (1) JPH0267633U (US20100012521A1-20100121-C00001.png)

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