JPH0265124U - - Google Patents

Info

Publication number
JPH0265124U
JPH0265124U JP14367488U JP14367488U JPH0265124U JP H0265124 U JPH0265124 U JP H0265124U JP 14367488 U JP14367488 U JP 14367488U JP 14367488 U JP14367488 U JP 14367488U JP H0265124 U JPH0265124 U JP H0265124U
Authority
JP
Japan
Prior art keywords
flow rate
detection
pressure
section
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14367488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14367488U priority Critical patent/JPH0265124U/ja
Publication of JPH0265124U publication Critical patent/JPH0265124U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP14367488U 1988-11-02 1988-11-02 Pending JPH0265124U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14367488U JPH0265124U (US06623731-20030923-C00012.png) 1988-11-02 1988-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14367488U JPH0265124U (US06623731-20030923-C00012.png) 1988-11-02 1988-11-02

Publications (1)

Publication Number Publication Date
JPH0265124U true JPH0265124U (US06623731-20030923-C00012.png) 1990-05-16

Family

ID=31410704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14367488U Pending JPH0265124U (US06623731-20030923-C00012.png) 1988-11-02 1988-11-02

Country Status (1)

Country Link
JP (1) JPH0265124U (US06623731-20030923-C00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1194603A (ja) * 1997-06-24 1999-04-09 Balzers Ag 真空設備への実際のガスの流れを監視するための方法および真空処理装置
WO2019225496A1 (en) * 2018-05-23 2019-11-28 Hitachi Metals, Ltd. Multi-chamber rate-of-change system for gas flow verification

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1194603A (ja) * 1997-06-24 1999-04-09 Balzers Ag 真空設備への実際のガスの流れを監視するための方法および真空処理装置
WO2019225496A1 (en) * 2018-05-23 2019-11-28 Hitachi Metals, Ltd. Multi-chamber rate-of-change system for gas flow verification
JP2021526629A (ja) * 2018-05-23 2021-10-07 日立金属株式会社 ガス流量検証のためのマルチチャンバ変化率システム

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