JPH0264154U - - Google Patents

Info

Publication number
JPH0264154U
JPH0264154U JP14413688U JP14413688U JPH0264154U JP H0264154 U JPH0264154 U JP H0264154U JP 14413688 U JP14413688 U JP 14413688U JP 14413688 U JP14413688 U JP 14413688U JP H0264154 U JPH0264154 U JP H0264154U
Authority
JP
Japan
Prior art keywords
valve
vacuum chamber
gas
flow rate
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14413688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14413688U priority Critical patent/JPH0264154U/ja
Publication of JPH0264154U publication Critical patent/JPH0264154U/ja
Pending legal-status Critical Current

Links

JP14413688U 1988-11-04 1988-11-04 Pending JPH0264154U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14413688U JPH0264154U (enrdf_load_stackoverflow) 1988-11-04 1988-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14413688U JPH0264154U (enrdf_load_stackoverflow) 1988-11-04 1988-11-04

Publications (1)

Publication Number Publication Date
JPH0264154U true JPH0264154U (enrdf_load_stackoverflow) 1990-05-14

Family

ID=31411575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14413688U Pending JPH0264154U (enrdf_load_stackoverflow) 1988-11-04 1988-11-04

Country Status (1)

Country Link
JP (1) JPH0264154U (enrdf_load_stackoverflow)

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