JPH0262654U - - Google Patents

Info

Publication number
JPH0262654U
JPH0262654U JP14113288U JP14113288U JPH0262654U JP H0262654 U JPH0262654 U JP H0262654U JP 14113288 U JP14113288 U JP 14113288U JP 14113288 U JP14113288 U JP 14113288U JP H0262654 U JPH0262654 U JP H0262654U
Authority
JP
Japan
Prior art keywords
sample
exchange device
vacuum
electron microscope
sample exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14113288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14113288U priority Critical patent/JPH0262654U/ja
Publication of JPH0262654U publication Critical patent/JPH0262654U/ja
Pending legal-status Critical Current

Links

JP14113288U 1988-10-31 1988-10-31 Pending JPH0262654U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14113288U JPH0262654U (US20090163788A1-20090625-C00002.png) 1988-10-31 1988-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14113288U JPH0262654U (US20090163788A1-20090625-C00002.png) 1988-10-31 1988-10-31

Publications (1)

Publication Number Publication Date
JPH0262654U true JPH0262654U (US20090163788A1-20090625-C00002.png) 1990-05-10

Family

ID=31405934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14113288U Pending JPH0262654U (US20090163788A1-20090625-C00002.png) 1988-10-31 1988-10-31

Country Status (1)

Country Link
JP (1) JPH0262654U (US20090163788A1-20090625-C00002.png)

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