JPH0261957U - - Google Patents

Info

Publication number

JPH0261957U

JPH0261957U JP14224388U JP14224388U JPH0261957U JP H0261957 U JPH0261957 U JP H0261957U JP 14224388 U JP14224388 U JP 14224388U JP 14224388 U JP14224388 U JP 14224388U JP H0261957 U JPH0261957 U JP H0261957U

Authority

JP

Japan

Prior art keywords

evaporation

film thickness

evaporation sources

shutters

sources

Prior art date

1988-10-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001704 evaporation Methods 0.000 claims description 7
• 230000008020 evaporation Effects 0.000 claims description 7
• 238000007738 vacuum evaporation Methods 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims 2
• 238000001514 detection method Methods 0.000 claims 1
• 238000010276 construction Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)