JPH0260863U - - Google Patents

Info

Publication number
JPH0260863U
JPH0260863U JP14041188U JP14041188U JPH0260863U JP H0260863 U JPH0260863 U JP H0260863U JP 14041188 U JP14041188 U JP 14041188U JP 14041188 U JP14041188 U JP 14041188U JP H0260863 U JPH0260863 U JP H0260863U
Authority
JP
Japan
Prior art keywords
substrate
normally closed
closed valve
mesa portion
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14041188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH082592Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988140411U priority Critical patent/JPH082592Y2/ja
Publication of JPH0260863U publication Critical patent/JPH0260863U/ja
Application granted granted Critical
Publication of JPH082592Y2 publication Critical patent/JPH082592Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Sampling And Sample Adjustment (AREA)
JP1988140411U 1988-10-27 1988-10-27 マイクロシステムガスセンサ Expired - Lifetime JPH082592Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988140411U JPH082592Y2 (ja) 1988-10-27 1988-10-27 マイクロシステムガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988140411U JPH082592Y2 (ja) 1988-10-27 1988-10-27 マイクロシステムガスセンサ

Publications (2)

Publication Number Publication Date
JPH0260863U true JPH0260863U (US07754267-20100713-C00021.png) 1990-05-07
JPH082592Y2 JPH082592Y2 (ja) 1996-01-29

Family

ID=31404554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988140411U Expired - Lifetime JPH082592Y2 (ja) 1988-10-27 1988-10-27 マイクロシステムガスセンサ

Country Status (1)

Country Link
JP (1) JPH082592Y2 (US07754267-20100713-C00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011017624A (ja) * 2009-07-09 2011-01-27 Fuji Electric Systems Co Ltd 薄膜ガスセンサおよび薄膜ガスセンサの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245754A (ja) * 1988-08-05 1990-02-15 Toshiba Corp 酸素検出素子及びその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245754A (ja) * 1988-08-05 1990-02-15 Toshiba Corp 酸素検出素子及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011017624A (ja) * 2009-07-09 2011-01-27 Fuji Electric Systems Co Ltd 薄膜ガスセンサおよび薄膜ガスセンサの製造方法

Also Published As

Publication number Publication date
JPH082592Y2 (ja) 1996-01-29

Similar Documents

Publication Publication Date Title
JPH0260863U (US07754267-20100713-C00021.png)
JPH034243U (US07754267-20100713-C00021.png)
JPH01154460U (US07754267-20100713-C00021.png)
JPS6427635U (US07754267-20100713-C00021.png)
JPH0227753U (US07754267-20100713-C00021.png)
JPS614002U (ja) ノズルフラツパ機構のフラツパ
JPS63195167U (US07754267-20100713-C00021.png)
JPS62190179U (US07754267-20100713-C00021.png)
JPH0346230U (US07754267-20100713-C00021.png)
JPH0233978U (US07754267-20100713-C00021.png)
JPS62197036U (US07754267-20100713-C00021.png)
JPS6172866U (US07754267-20100713-C00021.png)
JPH0471032U (US07754267-20100713-C00021.png)
JPS62133144U (US07754267-20100713-C00021.png)
JPS62181769U (US07754267-20100713-C00021.png)
JPS62131453U (US07754267-20100713-C00021.png)
JPS62146057U (US07754267-20100713-C00021.png)
JPS6116472U (ja)
JPS6360777U (US07754267-20100713-C00021.png)
JPH02108497U (US07754267-20100713-C00021.png)
JPH01173655U (US07754267-20100713-C00021.png)
JPH01140137U (US07754267-20100713-C00021.png)
JPS6456025U (US07754267-20100713-C00021.png)
JPS6251249U (US07754267-20100713-C00021.png)
JPH0158120U (US07754267-20100713-C00021.png)