JPH0260863U - - Google Patents
Info
- Publication number
- JPH0260863U JPH0260863U JP14041188U JP14041188U JPH0260863U JP H0260863 U JPH0260863 U JP H0260863U JP 14041188 U JP14041188 U JP 14041188U JP 14041188 U JP14041188 U JP 14041188U JP H0260863 U JPH0260863 U JP H0260863U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- normally closed
- closed valve
- mesa portion
- gas sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988140411U JPH082592Y2 (ja) | 1988-10-27 | 1988-10-27 | マイクロシステムガスセンサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988140411U JPH082592Y2 (ja) | 1988-10-27 | 1988-10-27 | マイクロシステムガスセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0260863U true JPH0260863U (US07754267-20100713-C00021.png) | 1990-05-07 |
JPH082592Y2 JPH082592Y2 (ja) | 1996-01-29 |
Family
ID=31404554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988140411U Expired - Lifetime JPH082592Y2 (ja) | 1988-10-27 | 1988-10-27 | マイクロシステムガスセンサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH082592Y2 (US07754267-20100713-C00021.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011017624A (ja) * | 2009-07-09 | 2011-01-27 | Fuji Electric Systems Co Ltd | 薄膜ガスセンサおよび薄膜ガスセンサの製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0245754A (ja) * | 1988-08-05 | 1990-02-15 | Toshiba Corp | 酸素検出素子及びその製造方法 |
-
1988
- 1988-10-27 JP JP1988140411U patent/JPH082592Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0245754A (ja) * | 1988-08-05 | 1990-02-15 | Toshiba Corp | 酸素検出素子及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011017624A (ja) * | 2009-07-09 | 2011-01-27 | Fuji Electric Systems Co Ltd | 薄膜ガスセンサおよび薄膜ガスセンサの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH082592Y2 (ja) | 1996-01-29 |