JPH0260555U - - Google Patents

Info

Publication number

JPH0260555U

JPH0260555U JP13851588U JP13851588U JPH0260555U JP H0260555 U JPH0260555 U JP H0260555U JP 13851588 U JP13851588 U JP 13851588U JP 13851588 U JP13851588 U JP 13851588U JP H0260555 U JPH0260555 U JP H0260555U

Authority

JP

Japan

Prior art keywords

cleaned

mounting table

outer periphery

lift mechanism

view

Prior art date

1988-10-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 3
• 238000005406 washing Methods 0.000 claims 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
• 239000007921 spray Substances 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 238000002347 injection Methods 0.000 description 2
• 239000007924 injection Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1