JPH0260232U - - Google Patents

Info

Publication number
JPH0260232U
JPH0260232U JP13970588U JP13970588U JPH0260232U JP H0260232 U JPH0260232 U JP H0260232U JP 13970588 U JP13970588 U JP 13970588U JP 13970588 U JP13970588 U JP 13970588U JP H0260232 U JPH0260232 U JP H0260232U
Authority
JP
Japan
Prior art keywords
wafer
dry etching
reaction chamber
adsorbing
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13970588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13970588U priority Critical patent/JPH0260232U/ja
Publication of JPH0260232U publication Critical patent/JPH0260232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13970588U 1988-10-26 1988-10-26 Pending JPH0260232U (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13970588U JPH0260232U (US06534493-20030318-C00166.png) 1988-10-26 1988-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13970588U JPH0260232U (US06534493-20030318-C00166.png) 1988-10-26 1988-10-26

Publications (1)

Publication Number Publication Date
JPH0260232U true JPH0260232U (US06534493-20030318-C00166.png) 1990-05-02

Family

ID=31403213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13970588U Pending JPH0260232U (US06534493-20030318-C00166.png) 1988-10-26 1988-10-26

Country Status (1)

Country Link
JP (1) JPH0260232U (US06534493-20030318-C00166.png)

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