JPH0259495U - - Google Patents

Info

Publication number
JPH0259495U
JPH0259495U JP13814788U JP13814788U JPH0259495U JP H0259495 U JPH0259495 U JP H0259495U JP 13814788 U JP13814788 U JP 13814788U JP 13814788 U JP13814788 U JP 13814788U JP H0259495 U JPH0259495 U JP H0259495U
Authority
JP
Japan
Prior art keywords
axis
shaft
axis direction
fine movement
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13814788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0639359Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13814788U priority Critical patent/JPH0639359Y2/ja
Publication of JPH0259495U publication Critical patent/JPH0259495U/ja
Application granted granted Critical
Publication of JPH0639359Y2 publication Critical patent/JPH0639359Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP13814788U 1988-10-25 1988-10-25 微動装置 Expired - Lifetime JPH0639359Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13814788U JPH0639359Y2 (ja) 1988-10-25 1988-10-25 微動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13814788U JPH0639359Y2 (ja) 1988-10-25 1988-10-25 微動装置

Publications (2)

Publication Number Publication Date
JPH0259495U true JPH0259495U (US07582779-20090901-C00044.png) 1990-05-01
JPH0639359Y2 JPH0639359Y2 (ja) 1994-10-12

Family

ID=31400218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13814788U Expired - Lifetime JPH0639359Y2 (ja) 1988-10-25 1988-10-25 微動装置

Country Status (1)

Country Link
JP (1) JPH0639359Y2 (US07582779-20090901-C00044.png)

Also Published As

Publication number Publication date
JPH0639359Y2 (ja) 1994-10-12

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