JPH0253942U - - Google Patents

Info

Publication number

JPH0253942U

JPH0253942U JP13311488U JP13311488U JPH0253942U JP H0253942 U JPH0253942 U JP H0253942U JP 13311488 U JP13311488 U JP 13311488U JP 13311488 U JP13311488 U JP 13311488U JP H0253942 U JPH0253942 U JP H0253942U

Authority

JP

Japan

Prior art keywords

silicon

gas supply

supply mechanism

mechanism section

plasma

Prior art date

1988-10-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 4
• 239000010703 silicon Substances 0.000 claims description 4
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
• 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 2
• 238000010000 carbonizing Methods 0.000 claims 1
• 238000004544 sputter deposition Methods 0.000 claims 1
• 230000006698 induction Effects 0.000 description 1