JPH0252327U - - Google Patents

Info

Publication number
JPH0252327U
JPH0252327U JP13064688U JP13064688U JPH0252327U JP H0252327 U JPH0252327 U JP H0252327U JP 13064688 U JP13064688 U JP 13064688U JP 13064688 U JP13064688 U JP 13064688U JP H0252327 U JPH0252327 U JP H0252327U
Authority
JP
Japan
Prior art keywords
ray mask
holding substrate
chucks
vacuum
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13064688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13064688U priority Critical patent/JPH0252327U/ja
Publication of JPH0252327U publication Critical patent/JPH0252327U/ja
Pending legal-status Critical Current

Links

JP13064688U 1988-10-04 1988-10-04 Pending JPH0252327U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13064688U JPH0252327U (US06373033-20020416-M00071.png) 1988-10-04 1988-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13064688U JPH0252327U (US06373033-20020416-M00071.png) 1988-10-04 1988-10-04

Publications (1)

Publication Number Publication Date
JPH0252327U true JPH0252327U (US06373033-20020416-M00071.png) 1990-04-16

Family

ID=31386002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13064688U Pending JPH0252327U (US06373033-20020416-M00071.png) 1988-10-04 1988-10-04

Country Status (1)

Country Link
JP (1) JPH0252327U (US06373033-20020416-M00071.png)

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