JPH0250953U - - Google Patents

Info

Publication number
JPH0250953U
JPH0250953U JP12888488U JP12888488U JPH0250953U JP H0250953 U JPH0250953 U JP H0250953U JP 12888488 U JP12888488 U JP 12888488U JP 12888488 U JP12888488 U JP 12888488U JP H0250953 U JPH0250953 U JP H0250953U
Authority
JP
Japan
Prior art keywords
chamber
vacuum chamber
carrier
load lock
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12888488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12888488U priority Critical patent/JPH0250953U/ja
Publication of JPH0250953U publication Critical patent/JPH0250953U/ja
Pending legal-status Critical Current

Links

JP12888488U 1988-09-30 1988-09-30 Pending JPH0250953U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12888488U JPH0250953U (US07943777-20110517-C00090.png) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12888488U JPH0250953U (US07943777-20110517-C00090.png) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0250953U true JPH0250953U (US07943777-20110517-C00090.png) 1990-04-10

Family

ID=31382639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12888488U Pending JPH0250953U (US07943777-20110517-C00090.png) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0250953U (US07943777-20110517-C00090.png)

Similar Documents

Publication Publication Date Title
JPH08191100A (ja) 密閉コンテナ
JPH0250953U (US07943777-20110517-C00090.png)
JPH01130251U (US07943777-20110517-C00090.png)
JPH0165644U (US07943777-20110517-C00090.png)
JPS6436961U (US07943777-20110517-C00090.png)
JPH0485731U (US07943777-20110517-C00090.png)
JPH0184432U (US07943777-20110517-C00090.png)
JPH03111563U (US07943777-20110517-C00090.png)
JPH0719340A (ja) 真空チャンバ
JPH0648854Y2 (ja) ホットプレ−ト
JPS6355531U (US07943777-20110517-C00090.png)
JPS6324827U (US07943777-20110517-C00090.png)
JPS61141759U (US07943777-20110517-C00090.png)
JPH0180933U (US07943777-20110517-C00090.png)
JPS6385664U (US07943777-20110517-C00090.png)
JPH01161334U (US07943777-20110517-C00090.png)
JPH02141950U (US07943777-20110517-C00090.png)
JPS6384868U (US07943777-20110517-C00090.png)
JPS5841573U (ja) ウエ−ハ自動交換装置
JPS6168747U (US07943777-20110517-C00090.png)
JPS6057123U (ja) 半導体用プロセスチュ−ブ
JPS6169824U (US07943777-20110517-C00090.png)
JPH03111571U (US07943777-20110517-C00090.png)
JPS62122861U (US07943777-20110517-C00090.png)
JPS62155171U (US07943777-20110517-C00090.png)