JPH0246853U - - Google Patents
Info
- Publication number
- JPH0246853U JPH0246853U JP12602088U JP12602088U JPH0246853U JP H0246853 U JPH0246853 U JP H0246853U JP 12602088 U JP12602088 U JP 12602088U JP 12602088 U JP12602088 U JP 12602088U JP H0246853 U JPH0246853 U JP H0246853U
- Authority
- JP
- Japan
- Prior art keywords
- cooling device
- helium gas
- vapor deposition
- deposition apparatus
- metal vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12602088U JPH0246853U (US08063081-20111122-C00115.png) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12602088U JPH0246853U (US08063081-20111122-C00115.png) | 1988-09-27 | 1988-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246853U true JPH0246853U (US08063081-20111122-C00115.png) | 1990-03-30 |
Family
ID=31377149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12602088U Pending JPH0246853U (US08063081-20111122-C00115.png) | 1988-09-27 | 1988-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246853U (US08063081-20111122-C00115.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021503546A (ja) * | 2017-11-16 | 2021-02-12 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 堆積源を冷却する方法、堆積源を冷却するためのチャンバ、及び、堆積システム |
-
1988
- 1988-09-27 JP JP12602088U patent/JPH0246853U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021503546A (ja) * | 2017-11-16 | 2021-02-12 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 堆積源を冷却する方法、堆積源を冷却するためのチャンバ、及び、堆積システム |
| JP2023002533A (ja) * | 2017-11-16 | 2023-01-10 | アプライド マテリアルズ インコーポレイテッド | 堆積源を冷却する方法、堆積源を冷却するためのチャンバ、及び、堆積システム |
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