JPH0245627U - - Google Patents

Info

Publication number

JPH0245627U

JPH0245627U JP12482088U JP12482088U JPH0245627U JP H0245627 U JPH0245627 U JP H0245627U JP 12482088 U JP12482088 U JP 12482088U JP 12482088 U JP12482088 U JP 12482088U JP H0245627 U JPH0245627 U JP H0245627U

Authority

JP

Japan

Prior art keywords

vapor phase

core tube

phase growth

growth apparatus

furnace core

Prior art date

1988-09-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 2
• 230000007423 decrease Effects 0.000 claims 1
• 239000000376 reactant Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 239000012495 reaction gas Substances 0.000 description 1