JPH0244325U - - Google Patents

Info

Publication number
JPH0244325U
JPH0244325U JP12341788U JP12341788U JPH0244325U JP H0244325 U JPH0244325 U JP H0244325U JP 12341788 U JP12341788 U JP 12341788U JP 12341788 U JP12341788 U JP 12341788U JP H0244325 U JPH0244325 U JP H0244325U
Authority
JP
Japan
Prior art keywords
waveguide
processing apparatus
sample
center
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12341788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12341788U priority Critical patent/JPH0244325U/ja
Publication of JPH0244325U publication Critical patent/JPH0244325U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP12341788U 1988-09-22 1988-09-22 Pending JPH0244325U (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12341788U JPH0244325U (US07714131-20100511-C00038.png) 1988-09-22 1988-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12341788U JPH0244325U (US07714131-20100511-C00038.png) 1988-09-22 1988-09-22

Publications (1)

Publication Number Publication Date
JPH0244325U true JPH0244325U (US07714131-20100511-C00038.png) 1990-03-27

Family

ID=31372252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12341788U Pending JPH0244325U (US07714131-20100511-C00038.png) 1988-09-22 1988-09-22

Country Status (1)

Country Link
JP (1) JPH0244325U (US07714131-20100511-C00038.png)

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