JPH024338B2 - - Google Patents

Info

Publication number
JPH024338B2
JPH024338B2 JP2325184A JP2325184A JPH024338B2 JP H024338 B2 JPH024338 B2 JP H024338B2 JP 2325184 A JP2325184 A JP 2325184A JP 2325184 A JP2325184 A JP 2325184A JP H024338 B2 JPH024338 B2 JP H024338B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2325184A
Other versions
JPS60166032A (en
Inventor
Hayaaki Fukumoto
Masahiro Hatanaka
Hideo Kotani
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2325184A priority Critical patent/JPH024338B2/ja
Publication of JPS60166032A publication Critical patent/JPS60166032A/en
Publication of JPH024338B2 publication Critical patent/JPH024338B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/488Protection of windows for introduction of radiation into the coating chamber
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/482Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps
JP2325184A 1984-02-09 1984-02-09 Expired - Lifetime JPH024338B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2325184A JPH024338B2 (en) 1984-02-09 1984-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2325184A JPH024338B2 (en) 1984-02-09 1984-02-09

Publications (2)

Publication Number Publication Date
JPS60166032A JPS60166032A (en) 1985-08-29
JPH024338B2 true JPH024338B2 (en) 1990-01-26

Family

ID=12105376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2325184A Expired - Lifetime JPH024338B2 (en) 1984-02-09 1984-02-09

Country Status (1)

Country Link
JP (1) JPH024338B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726215B2 (en) * 1985-12-17 1995-03-22 キヤノン株式会社 Apparatus for photo-excitation process
JPS62238369A (en) * 1986-04-09 1987-10-19 Nissin Electric Co Ltd Light cvd device
US4849260A (en) * 1986-06-30 1989-07-18 Nihon Sinku Gijutsu Kabushiki Kaisha Method for selectively depositing metal on a substrate
US4994301A (en) * 1986-06-30 1991-02-19 Nihon Sinku Gijutsu Kabusiki Kaisha ACVD (chemical vapor deposition) method for selectively depositing metal on a substrate
EP0255454A3 (en) * 1986-07-26 1991-11-21 Nihon Shinku Gijutsu Kabushiki Kaisha Apparatus for chemical vapor deposition
GB9010638D0 (en) * 1990-05-11 1990-07-04 Secr Defence Photon assisted cvd apparatus and method
US20150184292A1 (en) * 2013-12-30 2015-07-02 Lam Research Corporation Systems and methods for preventing mixing of two gas streams in a processing chamber

Also Published As

Publication number Publication date
JPS60166032A (en) 1985-08-29

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