JPH024099U - - Google Patents

Info

Publication number
JPH024099U
JPH024099U JP8284388U JP8284388U JPH024099U JP H024099 U JPH024099 U JP H024099U JP 8284388 U JP8284388 U JP 8284388U JP 8284388 U JP8284388 U JP 8284388U JP H024099 U JPH024099 U JP H024099U
Authority
JP
Japan
Prior art keywords
lubricant
piston
container
motor
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8284388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529600Y2 (US06633600-20031014-M00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8284388U priority Critical patent/JPH0529600Y2/ja
Publication of JPH024099U publication Critical patent/JPH024099U/ja
Application granted granted Critical
Publication of JPH0529600Y2 publication Critical patent/JPH0529600Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Transmission Devices (AREA)
JP8284388U 1988-06-22 1988-06-22 Expired - Lifetime JPH0529600Y2 (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8284388U JPH0529600Y2 (US06633600-20031014-M00021.png) 1988-06-22 1988-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284388U JPH0529600Y2 (US06633600-20031014-M00021.png) 1988-06-22 1988-06-22

Publications (2)

Publication Number Publication Date
JPH024099U true JPH024099U (US06633600-20031014-M00021.png) 1990-01-11
JPH0529600Y2 JPH0529600Y2 (US06633600-20031014-M00021.png) 1993-07-28

Family

ID=31307584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284388U Expired - Lifetime JPH0529600Y2 (US06633600-20031014-M00021.png) 1988-06-22 1988-06-22

Country Status (1)

Country Link
JP (1) JPH0529600Y2 (US06633600-20031014-M00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203175A (ja) * 2004-12-22 2006-08-03 Tokyo Electron Ltd 真空処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203175A (ja) * 2004-12-22 2006-08-03 Tokyo Electron Ltd 真空処理装置
JP4588620B2 (ja) * 2004-12-22 2010-12-01 東京エレクトロン株式会社 真空処理装置

Also Published As

Publication number Publication date
JPH0529600Y2 (US06633600-20031014-M00021.png) 1993-07-28

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