JPH02362U - - Google Patents

Info

Publication number
JPH02362U
JPH02362U JP7753288U JP7753288U JPH02362U JP H02362 U JPH02362 U JP H02362U JP 7753288 U JP7753288 U JP 7753288U JP 7753288 U JP7753288 U JP 7753288U JP H02362 U JPH02362 U JP H02362U
Authority
JP
Japan
Prior art keywords
pure water
ion implantation
implantation device
high potential
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7753288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7753288U priority Critical patent/JPH02362U/ja
Publication of JPH02362U publication Critical patent/JPH02362U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7753288U 1988-06-10 1988-06-10 Pending JPH02362U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7753288U JPH02362U (enrdf_load_stackoverflow) 1988-06-10 1988-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7753288U JPH02362U (enrdf_load_stackoverflow) 1988-06-10 1988-06-10

Publications (1)

Publication Number Publication Date
JPH02362U true JPH02362U (enrdf_load_stackoverflow) 1990-01-05

Family

ID=31302511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7753288U Pending JPH02362U (enrdf_load_stackoverflow) 1988-06-10 1988-06-10

Country Status (1)

Country Link
JP (1) JPH02362U (enrdf_load_stackoverflow)

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