JPH0236043U - - Google Patents

Info

Publication number
JPH0236043U
JPH0236043U JP11605988U JP11605988U JPH0236043U JP H0236043 U JPH0236043 U JP H0236043U JP 11605988 U JP11605988 U JP 11605988U JP 11605988 U JP11605988 U JP 11605988U JP H0236043 U JPH0236043 U JP H0236043U
Authority
JP
Japan
Prior art keywords
carrier
wafer
inspected
vacuum
chucks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11605988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11605988U priority Critical patent/JPH0236043U/ja
Publication of JPH0236043U publication Critical patent/JPH0236043U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11605988U 1988-09-02 1988-09-02 Pending JPH0236043U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11605988U JPH0236043U (US20080293856A1-20081127-C00150.png) 1988-09-02 1988-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11605988U JPH0236043U (US20080293856A1-20081127-C00150.png) 1988-09-02 1988-09-02

Publications (1)

Publication Number Publication Date
JPH0236043U true JPH0236043U (US20080293856A1-20081127-C00150.png) 1990-03-08

Family

ID=31358270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11605988U Pending JPH0236043U (US20080293856A1-20081127-C00150.png) 1988-09-02 1988-09-02

Country Status (1)

Country Link
JP (1) JPH0236043U (US20080293856A1-20081127-C00150.png)

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