JPH0233978U - - Google Patents

Info

Publication number
JPH0233978U
JPH0233978U JP11224688U JP11224688U JPH0233978U JP H0233978 U JPH0233978 U JP H0233978U JP 11224688 U JP11224688 U JP 11224688U JP 11224688 U JP11224688 U JP 11224688U JP H0233978 U JPH0233978 U JP H0233978U
Authority
JP
Japan
Prior art keywords
piezo stack
control valve
valve
supported
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11224688U
Other languages
English (en)
Japanese (ja)
Other versions
JP2516824Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988112246U priority Critical patent/JP2516824Y2/ja
Publication of JPH0233978U publication Critical patent/JPH0233978U/ja
Application granted granted Critical
Publication of JP2516824Y2 publication Critical patent/JP2516824Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1988112246U 1988-08-27 1988-08-27 制御弁 Expired - Fee Related JP2516824Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988112246U JP2516824Y2 (ja) 1988-08-27 1988-08-27 制御弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988112246U JP2516824Y2 (ja) 1988-08-27 1988-08-27 制御弁

Publications (2)

Publication Number Publication Date
JPH0233978U true JPH0233978U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-05
JP2516824Y2 JP2516824Y2 (ja) 1996-11-13

Family

ID=31351010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988112246U Expired - Fee Related JP2516824Y2 (ja) 1988-08-27 1988-08-27 制御弁

Country Status (1)

Country Link
JP (1) JP2516824Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230159A (ja) * 2009-03-27 2010-10-14 Horiba Stec Co Ltd 流量制御弁

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4603207B2 (ja) * 2001-08-08 2010-12-22 株式会社堀場製作所 ガス希釈システム
JP5943549B2 (ja) * 2011-02-24 2016-07-05 株式会社不二工機 電動弁

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965491A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd ピエゾ式微小変位装置
JPS61127983A (ja) * 1984-11-27 1986-06-16 Esutetsuku:Kk 流体制御用バルブ
JPS62124373A (ja) * 1985-11-21 1987-06-05 Yamada Mie 制御器
JPS62215177A (ja) * 1986-03-14 1987-09-21 Nok Corp 三方弁
JPS63140179A (ja) * 1986-12-01 1988-06-11 Esutetsuku:Kk 微少流量制御弁

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965491A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd ピエゾ式微小変位装置
JPS61127983A (ja) * 1984-11-27 1986-06-16 Esutetsuku:Kk 流体制御用バルブ
JPS62124373A (ja) * 1985-11-21 1987-06-05 Yamada Mie 制御器
JPS62215177A (ja) * 1986-03-14 1987-09-21 Nok Corp 三方弁
JPS63140179A (ja) * 1986-12-01 1988-06-11 Esutetsuku:Kk 微少流量制御弁

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230159A (ja) * 2009-03-27 2010-10-14 Horiba Stec Co Ltd 流量制御弁
US8844901B2 (en) 2009-03-27 2014-09-30 Horiba Stec, Co., Ltd. Flow control valve

Also Published As

Publication number Publication date
JP2516824Y2 (ja) 1996-11-13

Similar Documents

Publication Publication Date Title
JPH0233978U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63166704U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6412980U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01133578U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61188080U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63126677U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0258809U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62185874U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62119580U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0298288U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6320585U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6345470U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0373657U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0236685U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01176275U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63195167U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6159975U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6212467U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62130277U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0229366U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62156678U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0265773U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0338475U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6411335U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63147979U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees