JPH02309075A - Flow control valve - Google Patents

Abstract

PURPOSE:To reduce the dead space and smoothly move the whole fluid without retaining part of it by forming a fluid passage opened with a face faced to a moving piece through a fixed core, and forming a flow passage guiding the fluid to a moving body. CONSTITUTION:When the voltage is applied to a coil 18 to magnetize a fixed core 15, a moving core 6 is attracted and moved by the magnetic force of the fixed core 15 against the elastic force of a plate spring 5, a valve body 8 is separated from a valve seat 3 to open the valve seat 3, the gas fed to an inflow passage 2 passes the long hole 13 of the plate spring 5, a recessed groove 10, a through hole 9 and a flow gas 12 from the valve seat 3, and it flows out from an outflow passage member 20 through the flow passage 17 of the fixed core 15. The flow passage of gas nearly matches with the arrangement of the valve seat 3, valve body 8, moving core 6 and fixed core 15, thus the dead space is extremely reduced. The suction force of the gas flowing in a fluid passage 17 is applied to the through hole 9 and a flow gap 12, thus the whole quantity of gas flows smoothly, and the retention of part of gas can be almost prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a control valve that controls the flow rate of fluid such as gas or liquid.

(Prior Art) As a control valve for controlling the flow rate of fluid such as gas, for example, a normally closed type shown in FIG. 6 is known.

In FIG. 6, 31 is a flow path block, 32 is an inflow path formed in the flow path block 31, and the end thereof is connected to the partition wall 33.
, and an outflow path 34 is formed via a bracket partition v33. 35 is a valve chamber formed in the radial side portion of the inlet passage 32 and the outlet passage 34 in communication with each other;
6 is a valve seat formed at the end of the outflow passage 34 facing the valve chamber 35.

Reference numeral 37 denotes an inner cylinder made of a non-magnetic material, the end of which is attached to the flow path block 31. Reference numeral 38 denotes a movable core made of a magnetic material such as iron and slidably inserted into the inner cylinder 37 , and its end portion is inserted into the valve chamber 35 .

39 is a valve body provided on the end face of the movable core 38, 40 is attached to the movable core 38 at one end, and the other end is connected to the flow path block 3.
A leaf spring fixed to the movable core 38 supports the movable core 38.

41 is opposed to the movable core 38 and is provided with a slide gap 42
This fixed core 41 is also formed of a magnetic material. 43 is provided on the outer periphery of the inner cylinder 37 in order to magnetize the fixed core 41. The coil 44 is an outer cylinder.

A fluid such as gas is supplied to the inflow path 32 of this flow rate control valve. When making the fluid flow from the inflow path 32 to the outflow path 34, a voltage is applied to the coil 43. Then, the fixed core 41 is magnetized, moves the movable core 38 by suction against the force of the leaf spring 40, separates the valve body 39 from the valve seat 36, opens the valve seat 36, and removes the driftwood in the inflow path 32. is caused to flow out through the valve chamber 35 and into the outflow path 34.

The flow rate of the flowing driftwood as described above is controlled by the coil 43.
The distance between the valve [36 and the valve body 39] is changed by changing the amount of sliding of the movable core 38 by changing the magnetic force of the fixed core 41 by changing the voltage applied to the valve body.

(Problems to be Solved by the Invention) In the conventional flow control valve, the valve chamber 35 and the inner cylinder 37 are located at a curved part of the fluid flow path, and therefore these become a large dead space.

Moreover, when the driftwood is caused to flow from the inflow path 32 to the outflow i\334, the suction force of the flowing fluid that acts on the fluid that has flowed into the valve chamber 35 and the inner cylinder 37 is reduced due to the above configuration. There is a problem that the fluid in the valve chamber 35 and the inner cylinder 37 flows slowly or becomes difficult, and the exchange thereof becomes slow or difficult.

For example, when the flowing gas is a sample gas for measuring its components, problems such as a decrease in analysis accuracy occur due to the gas being delayed or difficult to replace.

The present invention solves the above-mentioned problems,
The purpose of this is to create a flow control valve that can reduce the dead space and allow the entire amount of fluid, such as gas or liquid, to flow smoothly without stagnation.

(Means for Solving Problem B) The flow control valve of the present invention has a fixed core made of a magnetic material around which a coil is arranged, and is moved by attraction due to the magnetic force of the fixed core or release from the magnetic force. In a flow control valve consisting of a movable body composed of a movable core made of a magnetic material, a valve body, and a support spring, which opens and closes a valve seat, a fluid passes through the fixed core by opening a surface facing the movable body. The movable body is characterized in that a passageway is formed and a flow passageway for guiding the fluid is formed in the movable body.

For smooth fluid flow, it is preferable that the flow passage of the movable body be formed as a hole in the movable core, corresponding to the cross-sectional area of the fluid passage of the fixed core.

The position of the valve seat is selected depending on whether the valve seat is a normally closed type or a normal oven type. Stand on the side! Provided at the end of the fixed core, etc.

The flow path of the movable body is formed as a hole passing through the support spring and the movable core, or a hole is provided in the support spring, and the fluid passing through the hole is made to flow around the outer circumference of the movable core, and the flow of the fixed core ( *With 1,000 different compositions, such as guiding you to the path.
Wear.

(Function) The valve seat in this flow rate control valve is opened and closed by applying a voltage to the coil to magnetize the fixed core, and using the magnetic force to attract and move the movable body, or by cutting off the voltage applied to the coil.
This is done by releasing the movable body from the magnetic force and moving it by the force of the support spring. Control of the flow rate of flowing fluid is
The distance between the valve seat and the valve body is changed by varying the voltage applied to the coil.

The fluid such as gas is caused to pass through the flow path of the movable body, and is caused to flow out through the fluid path of the fixed core. In this manner, the fixed core is provided with a fluid passage passing through it, and the fluid flow path is made to substantially match the arrangement of the movable body and the fixed core, thereby reducing the dead space. Moreover, 1. The suction force of the fluid passing through the fluid path of the fixed core acts on almost the entire upstream side, so there is almost no chance of a part of the fluid remaining, and the entire amount of fluid can flow smoothly. .

(Actual j1!i1'!111) A first embodiment of the flow control valve of the present invention will be described with reference to the normally closed type for gas shown in FIGS. 1 to 4.

1 to 4, reference numeral 1 denotes an inflow passage member through which a gas inflow passage 2 is formed, and a valve seat 3 is formed at the end of this inflow passage 2. Reference numeral 4 denotes a movable body, in which a movable core 6 made of a magnetic material such as polar stainless steel is welded to one side of a leaf spring 5 serving as a support spring, and a movable core 6 made of a magnetic material such as polar stainless steel is attached to the center of the leaf spring 5. A valve body 8 made of rubber, plastic, metal, or the like is fitted and fixed into a hole 7 formed in the valve body.

A through hole 9 and a groove 10 are formed in the movable core 6 as a flow path for the movable body 4, and the groove 10 is formed in the end of the movable core 6 in the radial direction of the valve body 8. The thickness is made deeper than the thickness of the through hole 9 so that gas flows into the through hole 9.

The movable body 4 then attaches the valve body 8 to the valve seat 3.
The outer periphery of the leaf spring 5 is held between the inflow path member 1 and the ring-shaped fixing member 11, which are in contact with each other, and are fixed to the inflow path member 1. 12 is a gas flow gap formed between the outer peripheral surface of the movable core 6 and the inner peripheral surface of the fixed member 11.

The leaf spring 5 is formed by providing a plurality of elongated holes 13 extending in the circumferential direction around the hole 7, as shown in FIG. 4, in order to smooth elastic deformation in the thickness direction. has been done.

Reference numeral 14 denotes an inner cylinder made of a non-magnetic material that is fixed and erected at the end of the fixed member 11, and 15 is a fixed core formed of a magnetic material such as polar stainless steel, which is inserted into the inner cylinder 14 at the end thereof. ,
Further, it is fixed to the inner cylinder 14 with a sliding gap 16 between the movable core 6 and the movable core 6. Reference numeral 17 denotes a fluid passage passing through the fixed core 15, and is formed to have approximately the same size as the through hole.

18 is a coil disposed around the inner cylinder 14 and the fixed core 15; 19 is an outer cylinder; and 20 is a pipe-shaped outflow passage member disposed in communication with the fluid passage 17.

This flow rate control valve is configured as described above, and gas is supplied to the inflow path 2 of the inflow path member 1, and the valve seat 3 is normally closed by the valve body 8. .

When flowing gas, a voltage is applied to the coil 18 to magnetize the fixed core 15. Then, the movable core 6 is attracted and moved by the magnetic force of the fixed core 15 against the elasticity of the leaf spring 5, separating the valve body 8 from the valve seat 3 and opening the valve seat 3.
The gas supplied to the inflow path 2 flows from the valve seat 3 to the elongated hole 13 of the leaf spring 5, to the concave bank 10. The fluid 817 of the fixed core 15 passes through the through hole 9 and the flow gap 12, and the outflow path member 20
It flows out from the

The amount of gas flowing is controlled by changing the magnetic force of the fixed core 15 by changing the voltage applied to the coil 18, changing the movement of the movable core 6, and changing the distance between the valve body 8 and the valve seat 3. .

In this way, the gas flows into the fluid path 17 after passing through the through hole 9 and the flow gap 12, and the flow path of this waste, the valve seat 3, the valve body 8, the movable core 6, and the fixed core 15, the dead space becomes extremely small. Moreover, since the suction force of the gas acting on the fluid path 17 acts on the through hole 9 and the circulation gap 12,
The entire amount of gas flows smoothly, and it is possible to almost eliminate retention of a portion of the gas.

In this embodiment, one through hole of the movable core 6 and one of the fixed cores 15 are
Since the fluid passages 17 and the fluid passages 17 are formed to have approximately the same size, the waste that has passed through the through-holes 9 passes through the fluid passages 17 smoothly, so that the circulating gas can be replaced more quickly.

As in the flow control valve of this embodiment, the movable core 6
If the fixed core 15 and the movable core 6 are made of polar stainless steel, even if the flowing gas is corrosive, the movable core 6 and the fixed core 1
There is no fear of corrosion of the movable core 6 or the fixed core 15, and it can be used for a long period of time, and the problem of contaminating the gas due to one corrosion of the movable core 6 or the fixed core 15 can be prevented.

Further, since a gas flow gap 12 is formed around the outer circumference of the movable core 6 to prevent the movable core 6 from coming into contact with the fixed member 11 and the inner surface of the inner cylinder 14, even if the movable core 6 repeatedly slides, particles will not be generated. There is no risk of generation, and there is no possibility of contaminating the gas with particles.

Therefore, if this flow rate control valve is used in, for example, a mass flow controller, it is possible to smoothly flow the entire amount of gas and quickly replace it, and also provides a mass flow controller with no risk of gas contamination. can do.

In this embodiment, in order to circulate fluid such as gas, a through hole 9 is provided in the movable core 6, and a circulation gap 12 is formed on the outer periphery of the movable core 6. It is optional, such as using only one of 12, as long as it allows gas to flow. The driftwood path 17 is formed as a hole with a circular cross section in the center of the fixed core 15 as shown in FIG.
This cross-sectional shape may be any other arbitrary shape such as a rectangular shape, or may be provided in the shape of a steel core with respect to the fixed core 15. This also applies to the through hole 9 of the movable core 6.

FIG. 5 shows a second embodiment of the flow control valve of the present invention, which is a normally open type.

In FIG. 5, reference numeral 1a denotes an inflow path member through which a gas inflow path 2a is formed. Reference numeral 4a denotes a movable body, in which a movable core 6a made of a magnetic material such as polar stainless steel is fixed to one side of a leaf spring 5a as a support spring by welding or the like, and is movable on the side opposite to the inlet passage member 1a. A valve body 8a is attached to the end of the core 6a.

The movable core 6a is formed with a through hole 9a as a flow path and a groove 10a, and the recess 410a is formed in the movable core 6.
It is formed at the end of the valve body 8a to be deeper in the radial direction than the thickness of the valve body 8a. Further, a hole 7a is formed in the leaf spring 5a, which overlaps with the through hole 9a.

A fixed core 15a in the form of a pipe is made of a magnetic material such as polar stainless steel and has a fluid passing through it.
A valve seat 3a, which is opened and closed by the valve body 8a, is protrudingly provided at the end opposite to the valve body 8a in communication with the fluid path 17a, and the valve seat 3a and the valve body 8a are spaced apart from each other. Delivery!
has been done.

The structure of the pond is the same as that of the first embodiment, so the same reference numerals are given and detailed explanation is omitted.

This flow rate control valve allows gas to flow through the inflow path 2a of the inflow path member 1a.
Normally, the valve body 8a is separated from the valve seat 3a, and the valve seat 3a is open. The gas supplied to the inflow path 2a passes through the hole 7a, the through hole 9a, and the groove 10a, and flows out through the valve seat 3a and the fluid path 17a.

The gas flow rate is controlled by applying voltage to the coil 18, magnetizing the fixed core 15a, and using the magnetic force to magnetize the movable core 6a.
The valve seat 3a and the valve body 8a are moved by suction, and the distance between the valve seat 3a and the valve body 8a is changed to adjust the amount of gas flowing therethrough. The gas flow is interrupted by applying voltage to the coil 18, sucking the movable core 6a with the fixed core 15a, and causing the valve body 8a to close the valve seat 3a.
will be closed.

As is clear from this second embodiment, by simply changing the positions of the valve Ji3a and the valve body 8a, normal oven type flow can be achieved. The control valve can also be easily constructed.

(Effects of the Invention) As described above, the flow control valve of the present invention includes a fixed core having a fluid path passing through the fixed core with the surface facing the movable body open, and a fluid passage passing through the fixed core by opening the surface facing the movable body. It forms a flow path that guides the driftwood through it.
, ゛ Therefore, since the fluid flow path and the arrangement of the movable body and fixed core almost match, the dead space becomes small. Moreover, since the suction force of the fluid flowing through the fluid path of the fixed core acts on almost the entire upstream side, there is no possibility that a portion of the fluid remains in the flow path of the movable body, and the entire amount of fluid is always maintained. It can be flowed smoothly and replaced quickly.

[Brief explanation of the drawing]

1 to 4 show a first embodiment of the present invention, FIG. 1 is a sectional front view, FIG. 2 is a sectional plan view of the movable body part, FIG. 3 is a right side view of the fixed core, and FIG. 5 is a front view of the leaf spring, FIG. 5 is a sectional front view showing the second embodiment, and FIG. 6 is a sectional front view showing the conventional example. 3.3a: Valve seat, 4.4a: Movable body, 5.5a: Leaf spring, 6.6a: Movable core, 8.8a: Valve body, 15.15a
Fixed core, 17/17a: Fluid path.

Claims (2)

[Claims] (1) A fixed core made of a magnetic material with a coil arranged around it, a movable core made of a magnetic material that opens and closes the valve seat by moving due to attraction by the magnetic force of the fixed core or release from the magnetic force, and a valve. In the flow control valve, a fluid path is formed in the fixed core and passes through the fixed core by opening a surface facing the movable body, and guides fluid to the movable body. A flow control valve characterized in that a flow passage is formed. (2) The flow control valve according to claim 1, wherein the flow passage of the movable body is formed as a hole in the movable core, corresponding to the fluid passage of the fixed core.