JPH02307006A - Surface shape measuring instrument - Google Patents

Surface shape measuring instrument

Info

Publication number
JPH02307006A
JPH02307006A JP12951289A JP12951289A JPH02307006A JP H02307006 A JPH02307006 A JP H02307006A JP 12951289 A JP12951289 A JP 12951289A JP 12951289 A JP12951289 A JP 12951289A JP H02307006 A JPH02307006 A JP H02307006A
Authority
JP
Japan
Prior art keywords
line sensors
line
light
photodetectors
arithmetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12951289A
Other languages
Japanese (ja)
Inventor
Koji Oka
Moritoshi Ando
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12951289A priority Critical patent/JPH02307006A/en
Publication of JPH02307006A publication Critical patent/JPH02307006A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the size of the instrument and to make a fast linear scan by providing an irradiation optical system, 1st and 2nd line sensors, an image formation optical means, filters, and an arithmetic means.
CONSTITUTION: The irradiation optical means 1 irradiates a measured surface 2 with slit light 3 to form a light cutting line 4. The image formation optical means 7 is constituted of, for example, an image forming lens and a half-mirror and images the light cutting line 4 on the 1st and 2nd line sensors 5 and 6. The filters 8 are arranged on the light receiving surfaces of the line sensors 5 and 6 and vary monotonously in transmissivity orthogonal to the array direction of the photodetectors of the line sensors 5 and 6. The arithmetic means 9 uses the outputs of the corresponding photodetectors of the line sensors 5 and 6 to find the surface shape at the position of the light cutting line 4.
COPYRIGHT: (C)1990,JPO&Japio
JP12951289A 1989-05-23 1989-05-23 Surface shape measuring instrument Pending JPH02307006A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12951289A JPH02307006A (en) 1989-05-23 1989-05-23 Surface shape measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12951289A JPH02307006A (en) 1989-05-23 1989-05-23 Surface shape measuring instrument

Publications (1)

Publication Number Publication Date
JPH02307006A true JPH02307006A (en) 1990-12-20

Family

ID=15011328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12951289A Pending JPH02307006A (en) 1989-05-23 1989-05-23 Surface shape measuring instrument

Country Status (1)

Country Link
JP (1) JPH02307006A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101877592B1 (en) * 2011-02-11 2018-07-11 나고야덴키코교 가부시키가이샤 Inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101877592B1 (en) * 2011-02-11 2018-07-11 나고야덴키코교 가부시키가이샤 Inspection device

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