JPH02300609A - Three-dimensional position measuring instrument - Google Patents

Three-dimensional position measuring instrument

Info

Publication number
JPH02300609A
JPH02300609A JP12040589A JP12040589A JPH02300609A JP H02300609 A JPH02300609 A JP H02300609A JP 12040589 A JP12040589 A JP 12040589A JP 12040589 A JP12040589 A JP 12040589A JP H02300609 A JPH02300609 A JP H02300609A
Authority
JP
Japan
Prior art keywords
photodetection
light
read
light irradiation
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12040589A
Other languages
Japanese (ja)
Other versions
JP2597711B2 (en
Inventor
Yasuji Hattori
Susumu Inoue
Masaichi Mobara
Original Assignee
Sumitomo Electric Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Ind Ltd filed Critical Sumitomo Electric Ind Ltd
Priority to JP1120405A priority Critical patent/JP2597711B2/en
Publication of JPH02300609A publication Critical patent/JPH02300609A/en
Application granted granted Critical
Publication of JP2597711B2 publication Critical patent/JP2597711B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To measure an high-accuracy three-dimensional shape by the principle of trigonometrical measurement by detecting the position of a reflection point from the projection direction of probe light, the photodetection direction of a photodetection part, and the relative position relation between the photodetection part and a light irradiation part.
CONSTITUTION: At the light irradiation part A, the projection light of a light source 1 is passed through lenses 3 and 4 and reflected by a mirror 6 to form an image on the surface (a) of a body 7 to be inspected. The mirror 6 is mounted on a rotary stage 9 and its rotational position is read as an angle θ of rotation by a rotary encoder 11. At the photodetection part B which detects the reflected light from the body 7 to be inspected, the image pickup optical system 12 consisting of an image pickup lens 13 and a detector 14 is mounted on a rotary stage 16 and its angle of rotation is read by a rotary encoder 18. The light irradiation part A and photodetection part B are held on a rack 19, whose angle ω of rotation is read by a rotary encoder 21. Then a CPU 25 detects the position of the reflection point by the principle of trigonometric measurement from the light projection direction of the probe light, the photodetection direction of the photodetection part B, and the relative position relation between the photodetection part B and light irradiation part A.
COPYRIGHT: (C)1990,JPO&Japio
JP1120405A 1989-05-16 1989-05-16 3D position measuring device Expired - Fee Related JP2597711B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1120405A JP2597711B2 (en) 1989-05-16 1989-05-16 3D position measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1120405A JP2597711B2 (en) 1989-05-16 1989-05-16 3D position measuring device

Publications (2)

Publication Number Publication Date
JPH02300609A true JPH02300609A (en) 1990-12-12
JP2597711B2 JP2597711B2 (en) 1997-04-09

Family

ID=14785402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1120405A Expired - Fee Related JP2597711B2 (en) 1989-05-16 1989-05-16 3D position measuring device

Country Status (1)

Country Link
JP (1) JP2597711B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0523016U (en) * 1991-09-09 1993-03-26 住友電気工業株式会社 Three-dimensional position measuring device
CN105115443A (en) * 2015-08-19 2015-12-02 中国航空工业集团公司北京长城航空测控技术研究所 Horizontal full view angle high precision three-dimensional measuring method based on vision measurement technology

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59116806U (en) * 1983-01-28 1984-08-07
JPS60196608A (en) * 1984-03-21 1985-10-05 Tomohiko Akuta Automatic measuring method of three-dimensional configuration
JPS6281513A (en) * 1985-10-04 1987-04-15 Nec Corp Profilometer
JPS62274204A (en) * 1986-05-23 1987-11-28 Hamamatsu Photonics Kk Microscope system for obtaining three-dimensional data

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59116806U (en) * 1983-01-28 1984-08-07
JPS60196608A (en) * 1984-03-21 1985-10-05 Tomohiko Akuta Automatic measuring method of three-dimensional configuration
JPS6281513A (en) * 1985-10-04 1987-04-15 Nec Corp Profilometer
JPS62274204A (en) * 1986-05-23 1987-11-28 Hamamatsu Photonics Kk Microscope system for obtaining three-dimensional data

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0523016U (en) * 1991-09-09 1993-03-26 住友電気工業株式会社 Three-dimensional position measuring device
CN105115443A (en) * 2015-08-19 2015-12-02 中国航空工业集团公司北京长城航空测控技术研究所 Horizontal full view angle high precision three-dimensional measuring method based on vision measurement technology

Also Published As

Publication number Publication date
JP2597711B2 (en) 1997-04-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees