JPH02293628A - 流体の質量流量制御装置 - Google Patents
流体の質量流量制御装置Info
- Publication number
- JPH02293628A JPH02293628A JP27143189A JP27143189A JPH02293628A JP H02293628 A JPH02293628 A JP H02293628A JP 27143189 A JP27143189 A JP 27143189A JP 27143189 A JP27143189 A JP 27143189A JP H02293628 A JPH02293628 A JP H02293628A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve seat
- flow path
- assembly
- mass flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims description 30
- 238000003825 pressing Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000011324 bead Substances 0.000 abstract description 33
- 238000011144 upstream manufacturing Methods 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 47
- 230000000295 complement effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 210000004907 gland Anatomy 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000013618 particulate matter Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000006223 plastic coating Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- -1 rKel-FJ Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
- H01F7/16—Rectilinearly-movable armatures
- H01F7/1638—Armatures not entering the winding
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Power Engineering (AREA)
- Valve Housings (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33733089A | 1989-04-13 | 1989-04-13 | |
| US337330 | 1989-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02293628A true JPH02293628A (ja) | 1990-12-04 |
Family
ID=23320106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27143189A Pending JPH02293628A (ja) | 1989-04-13 | 1989-10-18 | 流体の質量流量制御装置 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0392072A1 (de) |
| JP (1) | JPH02293628A (de) |
| WO (1) | WO1990012239A1 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002277292A (ja) * | 2001-03-19 | 2002-09-25 | Ckd Corp | 流量センサユニット |
| JP2012211698A (ja) * | 2004-12-23 | 2012-11-01 | Mks Instruments Inc | 弁組立体 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3431631B2 (ja) * | 1993-10-06 | 2003-07-28 | ユニット インストルメンツ インコーポレーテッド | プロセス流体の処理装置 |
| US5730181A (en) * | 1994-07-15 | 1998-03-24 | Unit Instruments, Inc. | Mass flow controller with vertical purifier |
| US6293310B1 (en) | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
| US5992463A (en) * | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
| AU4459700A (en) * | 1999-04-19 | 2000-11-02 | Millipore Corporation | Modular surface mount mass flow and pressure controller |
| WO2002093053A1 (en) * | 2001-05-16 | 2002-11-21 | Unit Instruments, Inc. | Fluid flow system |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR6800E (fr) * | 1906-04-11 | 1907-03-01 | Constant Lecat | Joints pour canalisations de liquides, de vapeur, de gaz, etc. |
| US2307440A (en) * | 1940-11-07 | 1943-01-05 | Wylie G Wilson | Sealing ring |
| US2528665A (en) * | 1946-06-17 | 1950-11-07 | Hannifin Corp | Gasket seal |
| US2611506A (en) * | 1949-06-28 | 1952-09-23 | Foote Mineral Co | Sealing structure of the gasket type |
| GB870230A (en) * | 1957-11-29 | 1961-06-14 | Heraeus Gmbh W C | Improvements in or relating to flanged pipe joints including sealing elements |
| DE1525589A1 (de) * | 1966-09-28 | 1969-11-20 | Daimler Benz Ag | Metallische Flachdichtung |
| DE2758638A1 (de) * | 1977-12-29 | 1979-07-05 | Teves Gmbh Alfred | Magnetventil |
| EP0319618B1 (de) * | 1987-12-07 | 1992-07-22 | Akos Sule | Elektromagnetisches Ventil |
| US4569504A (en) * | 1983-05-20 | 1986-02-11 | Doyle Michael J | Solenoid |
| US4687020A (en) * | 1985-05-17 | 1987-08-18 | Doyle James H | Fluid mass flow controller |
| DE3529134A1 (de) * | 1985-08-14 | 1987-02-26 | Teves Gmbh Alfred | Magnetventil |
-
1989
- 1989-08-09 EP EP89114732A patent/EP0392072A1/de not_active Withdrawn
- 1989-10-18 JP JP27143189A patent/JPH02293628A/ja active Pending
-
1990
- 1990-04-13 WO PCT/US1990/002019 patent/WO1990012239A1/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002277292A (ja) * | 2001-03-19 | 2002-09-25 | Ckd Corp | 流量センサユニット |
| JP2012211698A (ja) * | 2004-12-23 | 2012-11-01 | Mks Instruments Inc | 弁組立体 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0392072A1 (de) | 1990-10-17 |
| WO1990012239A1 (en) | 1990-10-18 |
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