JPH022838U - - Google Patents

Info

Publication number

JPH022838U

JPH022838U JP8010788U JP8010788U JPH022838U JP H022838 U JPH022838 U JP H022838U JP 8010788 U JP8010788 U JP 8010788U JP 8010788 U JP8010788 U JP 8010788U JP H022838 U JPH022838 U JP H022838U

Authority

JP

Japan

Prior art keywords

wafer

probe

probe needle

hole

fixed

Prior art date

1988-06-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000523 sample Substances 0.000 claims description 8
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
• 229910052757 nitrogen Inorganic materials 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
• 229920002554 vinyl polymer Polymers 0.000 description 1