JPH02281932A - Manufacture of stamper for optical memory - Google Patents

Manufacture of stamper for optical memory

Info

Publication number
JPH02281932A
JPH02281932A JP10372089A JP10372089A JPH02281932A JP H02281932 A JPH02281932 A JP H02281932A JP 10372089 A JP10372089 A JP 10372089A JP 10372089 A JP10372089 A JP 10372089A JP H02281932 A JPH02281932 A JP H02281932A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
same
far ultraviolet
performed
ultraviolet irradiation
glass board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10372089A
Inventor
Shinichi Kamisuke
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/70Maintenance
    • B29C33/72Cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/263Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
    • B29C45/2632Stampers; Mountings thereof

Abstract

PURPOSE: To control generation of unevenness in a development, by a method wherein a far ultraviolet irradiation process of the surface of a glass board is performed as a preprocess of a forming process of a photoresist.
CONSTITUTION: Wet abrasion of the surface of a glass board is performed and then rubbing washing, for which pure water is used to remove an abrasive grain, is performed. Then the glass board is dried by a spin drying or baking (150°C) after supersonic washing of the same with the pure water or the same is dried similarly by the baking after steam washing of the same, for which isopropyl alcohol is used. Then dry washing by far ultraviolet irradiation is performed. Hereupon, hours required for treatment of the glass board and hours for which the same is left as it is (extending from far ultraviolet treatment up to coating of a resist and from the coating of the resist up to developing) are closely connected with an effect of the far ultraviolet irradiation. It is preferable to make the hours for which the same is left as it is fall within one hour to materialize sufficiently the effect of the far ultraviolet irradiation. With this construction, a developing mark is controlled and yield in a manufacturing process of a stamper for optical memory can be improved.
COPYRIGHT: (C)1990,JPO&Japio
JP10372089A 1989-04-24 1989-04-24 Manufacture of stamper for optical memory Pending JPH02281932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10372089A JPH02281932A (en) 1989-04-24 1989-04-24 Manufacture of stamper for optical memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10372089A JPH02281932A (en) 1989-04-24 1989-04-24 Manufacture of stamper for optical memory

Publications (1)

Publication Number Publication Date
JPH02281932A true true JPH02281932A (en) 1990-11-19

Family

ID=14361523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10372089A Pending JPH02281932A (en) 1989-04-24 1989-04-24 Manufacture of stamper for optical memory

Country Status (1)

Country Link
JP (1) JPH02281932A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09106584A (en) * 1995-10-13 1997-04-22 Nec Corp Production of recording master disk for optical disk
EP1609575A1 (en) * 2003-03-31 2005-12-28 Seiko Epson Corporation Lens molding die assembling device, lens molding die washing method, and lens molding die assembling method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09106584A (en) * 1995-10-13 1997-04-22 Nec Corp Production of recording master disk for optical disk
US6228562B1 (en) 1995-10-13 2001-05-08 Nec Corporation Method for manufacturing recording original disc for optical information recording media
EP1609575A1 (en) * 2003-03-31 2005-12-28 Seiko Epson Corporation Lens molding die assembling device, lens molding die washing method, and lens molding die assembling method
EP1609575A4 (en) * 2003-03-31 2007-03-21 Seiko Epson Corp Lens molding die assembling device, lens molding die washing method, and lens molding die assembling method

Similar Documents

Publication Publication Date Title
JPS58196238A (en) Electroless plating process
JPS6053073A (en) Solid-state image pickup element with microlens and manufacture thereof
JPS5599739A (en) Wafer treating method and its equipment
JPH04251930A (en) Method and apparatus for drying washed wafer
JPS62188323A (en) Method and equipment for washing and drying substrate
JPS5434751A (en) Washing method for silicon wafer
JPS5968737A (en) Simultaneous formation of positive and negative type patterns
JPH03261142A (en) Method of cleaning semiconductor substrate
JPS5654435A (en) Photosensitive resin coating method
JPS542720A (en) Forming method of photopolymerized image
JPS5519533A (en) Sheet and process for sublimation transfer
JPS6379791A (en) Production of thin film
JPS51136923A (en) Polyester monofilament
JPS57162336A (en) Coating method of resist on wafer
JPH0246727A (en) Method of holding wafer for pulling it up from pure water and drying it
JPS6040528A (en) Magnetic disk and its production
JPS5874186A (en) Biological treating agent for sewage
JPS58196971A (en) Manufacture of mask for sandblast
JPS5730536A (en) Rotary drum type combined granulator and drier
JPH02307737A (en) Method for washing stamper for optical disk
JPH0344646A (en) Formation of resist pattern
JPH02181152A (en) Manufacture of electrophotographic sensitive body
JPS6144627A (en) Preparation of fresnel microlens
JPS5888749A (en) Developing device
JPH01152459A (en) Printing method