JPH0227655U - - Google Patents

Info

Publication number

JPH0227655U

JPH0227655U JP10683788U JP10683788U JPH0227655U JP H0227655 U JPH0227655 U JP H0227655U JP 10683788 U JP10683788 U JP 10683788U JP 10683788 U JP10683788 U JP 10683788U JP H0227655 U JPH0227655 U JP H0227655U

Authority

JP

Japan

Prior art keywords

electrode

ceramic

cover

support

covered

Prior art date

1988-08-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000919 ceramic Substances 0.000 claims description 7
• 230000001133 acceleration Effects 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 3
• 238000000605 extraction Methods 0.000 claims description 2
• 150000002500 ions Chemical class 0.000 claims 4
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000005530 etching Methods 0.000 description 1
• 238000010884 ion-beam technique Methods 0.000 description 1