JPH0227653U - - Google Patents

Info

Publication number
JPH0227653U
JPH0227653U JP10683688U JP10683688U JPH0227653U JP H0227653 U JPH0227653 U JP H0227653U JP 10683688 U JP10683688 U JP 10683688U JP 10683688 U JP10683688 U JP 10683688U JP H0227653 U JPH0227653 U JP H0227653U
Authority
JP
Japan
Prior art keywords
ceramic cylinder
cover
disk
current introduction
introduction terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10683688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10683688U priority Critical patent/JPH0227653U/ja
Publication of JPH0227653U publication Critical patent/JPH0227653U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10683688U 1988-08-11 1988-08-11 Pending JPH0227653U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10683688U JPH0227653U (US08063081-20111122-C00044.png) 1988-08-11 1988-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10683688U JPH0227653U (US08063081-20111122-C00044.png) 1988-08-11 1988-08-11

Publications (1)

Publication Number Publication Date
JPH0227653U true JPH0227653U (US08063081-20111122-C00044.png) 1990-02-22

Family

ID=31340706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10683688U Pending JPH0227653U (US08063081-20111122-C00044.png) 1988-08-11 1988-08-11

Country Status (1)

Country Link
JP (1) JPH0227653U (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220037115A1 (en) * 2020-07-31 2022-02-03 Taiwan Semiconductor Manufacturing Company Limited Insulator for an ion implantation source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220037115A1 (en) * 2020-07-31 2022-02-03 Taiwan Semiconductor Manufacturing Company Limited Insulator for an ion implantation source
US12020896B2 (en) * 2020-07-31 2024-06-25 Taiwan Semiconductor Manufacturing Company, Ltd. Insulator for an ion implantation source

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