JPH02269928A - Vacuum gauge - Google Patents

Vacuum gauge

Info

Publication number
JPH02269928A
JPH02269928A JP9238789A JP9238789A JPH02269928A JP H02269928 A JPH02269928 A JP H02269928A JP 9238789 A JP9238789 A JP 9238789A JP 9238789 A JP9238789 A JP 9238789A JP H02269928 A JPH02269928 A JP H02269928A
Authority
JP
Japan
Prior art keywords
vibration
natural
frequency
vacuum
vibration frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9238789A
Other languages
Japanese (ja)
Inventor
Kinji Harada
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Sunao Nishikawa
Takashi Yoshida
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP9238789A priority Critical patent/JPH02269928A/en
Publication of JPH02269928A publication Critical patent/JPH02269928A/en
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the noises of an instrument and to improve the measurement accuracy by allowing a vibration beam to oscillate itself at its natural vibration frequency in a nonlinear vibration area.
CONSTITUTION: The vibration beam 2 is made to vibrate itself at its natural vibration frequency in the nonlinear vibration area. Namely, the vibration beam 2 is in motion in a magnetic field, so a conductor crosses magnetic flux to generate an electromotive force. This electromotive force is amplified by an amplifier 3 and the vibration beam 2 oscillates. Then a counter 5 counts the natural vibration frequency of the vibration beam 2. Then a CPU 7 calculates the degree of vacuum from the natural vibration frequency of the vibration beam 2 from the output of the counter 5 and calibration data from a ROM 6. Then a display mechanism 8 displays the degree of vacuum according to the output of the CPU 7. Consequently, noises of the instrument are reduced to improve the accuracy.
COPYRIGHT: (C)1990,JPO&Japio
JP9238789A 1989-04-12 1989-04-12 Vacuum gauge Granted JPH02269928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9238789A JPH02269928A (en) 1989-04-12 1989-04-12 Vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9238789A JPH02269928A (en) 1989-04-12 1989-04-12 Vacuum gauge

Publications (1)

Publication Number Publication Date
JPH02269928A true JPH02269928A (en) 1990-11-05

Family

ID=14053012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9238789A Granted JPH02269928A (en) 1989-04-12 1989-04-12 Vacuum gauge

Country Status (1)

Country Link
JP (1) JPH02269928A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856820A (en) * 1981-09-30 1983-04-04 Matsushita Electric Works Ltd Embossing method
JPS62288542A (en) * 1986-06-06 1987-12-15 Yokogawa Electric Corp Vibration type semiconductor transducer
JPS63171335A (en) * 1987-01-09 1988-07-15 Daiwa Shinku Kogyosho:Kk Temperature compensating system for piezoelectric type pressure gage
JPS646837A (en) * 1987-06-30 1989-01-11 Yokogawa Electric Corp Vibration type differential pressure sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856820A (en) * 1981-09-30 1983-04-04 Matsushita Electric Works Ltd Embossing method
JPS62288542A (en) * 1986-06-06 1987-12-15 Yokogawa Electric Corp Vibration type semiconductor transducer
JPS63171335A (en) * 1987-01-09 1988-07-15 Daiwa Shinku Kogyosho:Kk Temperature compensating system for piezoelectric type pressure gage
JPS646837A (en) * 1987-06-30 1989-01-11 Yokogawa Electric Corp Vibration type differential pressure sensor

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