JPH02266876A - Ultrasonic motor - Google Patents

Ultrasonic motor

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Publication number
JPH02266876A
JPH02266876A JP1083918A JP8391889A JPH02266876A JP H02266876 A JPH02266876 A JP H02266876A JP 1083918 A JP1083918 A JP 1083918A JP 8391889 A JP8391889 A JP 8391889A JP H02266876 A JPH02266876 A JP H02266876A
Authority
JP
Japan
Prior art keywords
vibration
vibrator
ultrasonic motor
piezoelectric
conversion member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1083918A
Other languages
Japanese (ja)
Other versions
JP2549309B2 (en
Inventor
Hiroshi Shimizu
洋 清水
Tetsuo Yoshida
哲男 吉田
Mitsuo Tamura
光男 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP1083918A priority Critical patent/JP2549309B2/en
Publication of JPH02266876A publication Critical patent/JPH02266876A/en
Application granted granted Critical
Publication of JP2549309B2 publication Critical patent/JP2549309B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To simplify the structure of an ultrasonic motor by employing a rod type elliptic motion vibrator and a vibration-rotation conversion member. CONSTITUTION:An ultrasonic motor is constituted of a piezo-electric elliptic motion vibrator 11', consisting of a piezo-electric ceramics column 11 and metallic rings connected to both terminals of the column 11, annular supporting frames 12, provided at the nodes of the vibration of the vibrator 11', and a cup type rotor 13, arranged with a vibration-rotation conversion member 13b and a driving shaft 13a. As a result, contact between the end of the vibrator 11' and the conversion member 13 comes on the same circumference with respect to the rotary shaft whereby a contacting area may be reduced and affection to the vibration may also be reduced.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は電子機器などに用いられる小型モータに関し、
特にローター直径の小さい小型の超音波モータに関する
ものである。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a small motor used in electronic equipment, etc.
In particular, it relates to a small ultrasonic motor with a small rotor diameter.

(従来の技術) 超音波モータは従来の電磁モータと比較して、低回転で
高いトルクが得られること、停止保持力を有すること、
電磁ノイズが小さいことなどの利点を有しており、カメ
ラのオートフォーカス用や自動車用パワーモータ等に使
用されている。
(Conventional technology) Compared to conventional electromagnetic motors, ultrasonic motors can obtain high torque at low rotation speeds and have stopping power.
It has advantages such as low electromagnetic noise, and is used for camera autofocus, automobile power motors, etc.

第7図及び第8図は従来の超音波モータの構造を示す概
略図であり、リング上の小歯状の突起部を設けた金属円
板51の突起部の形成されている面の裏側に二枚の圧電
セラミック円板52.53を接着した構造のステーター
51の上に円板状ローター54を圧接した構造となって
いる。圧電セラミック円板52.53は偶数等分に分極
の向きが厚さ方向に逆向きとなっており、これら二枚の
圧電セラミック板は分割角度の半分の角度だけずらして
接着されている。
FIGS. 7 and 8 are schematic diagrams showing the structure of a conventional ultrasonic motor, in which a metal disk 51 is provided with tooth-like protrusions on a ring, and the back side of the surface on which the protrusions are formed. It has a structure in which a disc-shaped rotor 54 is pressed onto a stator 51 having a structure in which two piezoelectric ceramic discs 52 and 53 are bonded together. The piezoelectric ceramic disks 52 and 53 are divided into even numbers with polarization directions opposite to each other in the thickness direction, and these two piezoelectric ceramic plates are adhered with an angle shifted by half the dividing angle.

(発明が解決しようとする課題) 第8図かられかるように従来の超音波モータにおいては
、ステーターを構成するために2枚の圧電セラミック円
板と金属円板を接着しているため、接着工程が難しい上
に接着条件のばらつきに伴う特性のばらつきが大きいと
云う欠点があった。また、円板の中心部にローターの回
転軸を設けるためステーターおよびローターの直径を大
きくする必要がある。そのため従来の超音波モータの実
用的な最小直径は15龍〜20鰭に限定されていた。
(Problem to be Solved by the Invention) As shown in Figure 8, in conventional ultrasonic motors, two piezoelectric ceramic disks and a metal disk are bonded to form the stator. The disadvantages are that the process is difficult and the characteristics vary widely due to variations in bonding conditions. Furthermore, since the rotation axis of the rotor is provided at the center of the disk, it is necessary to increase the diameters of the stator and rotor. Therefore, the practical minimum diameter of conventional ultrasonic motors has been limited to 15 to 20 fins.

本発明の課題は、ローターの直径を小さくし、接着工程
の少ない簡単な構造の超音波モータを提供することにあ
る。
An object of the present invention is to provide an ultrasonic motor with a simple structure in which the diameter of the rotor is reduced and the number of bonding steps is reduced.

本発明の別の課題はローターの直径として15關以下の
超音波モータを提供することにある。
Another object of the present invention is to provide an ultrasonic motor with a rotor diameter of 15 degrees or less.

(課題を解決するための手段) 本発明によれば、楕円運動振動を行う端部を有する圧電
楕円運動振動子と、前記端部を覆うように内周面で接触
して配され、前記楕円運動振動を回転軸の回りの回転運
動に変換する振動一回転変換部材とを有する超音波モー
タにおいて、前記端部は、前記内周面のうち、前記回転
軸に対して同一円周上の位置にある複数部分のみ接触す
る接触部を有し、前記内周面に対する接触面積を小さく
するようにしたことを特徴とする超音波モータが得られ
る。
(Means for Solving the Problems) According to the present invention, a piezoelectric elliptical motion vibrator having an end portion that performs elliptical motion vibration, and a piezoelectric elliptical motion vibrator disposed in contact with the inner circumferential surface so as to cover the end portion, In an ultrasonic motor having a vibration-to-rotation conversion member that converts kinetic vibration into rotational movement around a rotational axis, the end portion is located on the same circumference with respect to the rotational axis on the inner circumferential surface. There is obtained an ultrasonic motor characterized in that it has a contact portion that contacts only a plurality of portions located in the inner peripheral surface, and that the contact area with respect to the inner circumferential surface is reduced.

(作 用) 本発明の超音波モータにおいては、端面が円を含む楕円
運動を行う圧電楕円運動振動子を用い、この圧電楕円運
動振動子の端部と振動一回転変換部材の内周面との接触
がこの圧電振動子の回転軸に対して同一円周上の位置に
ある複数部分のみ接触する接触部で行われるため、この
振動回転変換部材の内周面に対する接触面積が小さ(圧
電楕円運動振動子の振動に対する影響が少なく、共振周
波数の変化などが少ない超音波モータが得られる。
(Function) In the ultrasonic motor of the present invention, a piezoelectric elliptical motion vibrator whose end face performs an elliptical motion including a circle is used, and the end of the piezoelectric elliptical motion vibrator and the inner circumferential surface of the vibration one-rotation conversion member are connected to each other. Since the contact is made at the contact portion that contacts only multiple parts located on the same circumference with respect to the rotation axis of the piezoelectric vibrator, the contact area with the inner peripheral surface of this vibration rotation conversion member is small (piezoelectric ellipse It is possible to obtain an ultrasonic motor that has less influence on the vibration of the motion vibrator and less changes in resonance frequency.

(実施例) 以下本発明の超音波モータについて図面を用いて詳しく
説明する。
(Example) The ultrasonic motor of the present invention will be described in detail below with reference to the drawings.

第1図は本発明の実施例に係る超音波モータの構成を示
す図である。
FIG. 1 is a diagram showing the configuration of an ultrasonic motor according to an embodiment of the present invention.

第1図において、超音波モータは圧電セラミックス円柱
11の両端部に金属リング10あるいは金属円板10′
を接合して構成した圧電楕円運動振動子11’ とこの
圧電楕円運動振動子11′の振動の節の部分に設けられ
たリング状支持枠12と振動一回転変換部材13bと、
駆動軸13aを配したカップ状ローター13とを有する
In FIG. 1, the ultrasonic motor includes a metal ring 10 or a metal disc 10' attached to both ends of a piezoelectric ceramic cylinder 11.
a piezoelectric elliptic motion vibrator 11' constructed by joining together, a ring-shaped support frame 12 provided at the vibration node of the piezoelectric elliptic motion vibrator 11', and a vibration one-rotation conversion member 13b;
It has a cup-shaped rotor 13 on which a drive shaft 13a is arranged.

第2図は本発明の超音波モータに用いる圧電楕円運動振
動子11’の構成の一例を示す斜視図である。この図に
おいて、圧電セラミックス円柱11には円周を4分割す
る位置に、長さ方向に平行に電極32,34,31.3
3が設けられている。一方この圧電セラミックス円柱1
1の両端に金属リング10もしくは金属円板10=が設
けられている。
FIG. 2 is a perspective view showing an example of the configuration of a piezoelectric elliptic motion vibrator 11' used in the ultrasonic motor of the present invention. In this figure, the piezoelectric ceramic cylinder 11 has electrodes 32, 34, 31.3 arranged parallel to its length at positions dividing the circumference into four.
3 is provided. On the other hand, this piezoelectric ceramic cylinder 1
A metal ring 10 or a metal disk 10= is provided at both ends of the metal ring 1.

第3図は本発明の超音波モータに用いる圧電セラミック
ス円柱11の断面図であり、第3図(a)は電極32.
34を(+)、電極31.33を(−)にして電圧を印
加した場合の分極の向きを破線の矢印21で示している
FIG. 3 is a sectional view of the piezoelectric ceramic cylinder 11 used in the ultrasonic motor of the present invention, and FIG. 3(a) shows the electrode 32.
The direction of polarization when a voltage is applied with 34 set to (+) and electrodes 31 and 33 set to (-) is shown by a broken arrow 21.

第3図(b)は第3図(a)のように分極した圧電セラ
ミックス円柱において電極33.34を(+)、電極3
1.32を(−)にして実線の矢印22で示すように電
圧を印加した場合の断面の歪みを示す図である。
FIG. 3(b) shows electrodes 33 and 34 (+) in a piezoelectric ceramic cylinder polarized as shown in FIG. 3(a).
1.32 is set to (-) and a voltage is applied as shown by a solid arrow 22, which shows the distortion in the cross section.

第3図(b)において電圧は電極34から31、電極3
3から32に印加される。そのために分極方向に依存し
て圧電セラミックス円柱11の周面に沿うように電極3
4.31間は伸び、電極33゜32間は縮む。その結果
として第3図(b)において、長さ方向に下側が膨らむ
ように屈曲する。
In FIG. 3(b), the voltage is applied to electrodes 34 to 31, electrode 3
3 to 32. For this purpose, the electrode 3 is placed along the circumferential surface of the piezoelectric ceramic cylinder 11 depending on the polarization direction.
The area between the electrodes 4 and 31 expands, and the area between the electrodes 33 and 32 contracts. As a result, as shown in FIG. 3(b), it is bent so that the lower side bulges in the length direction.

また、印加電圧の極性が逆向きであれば屈曲も逆になる
Furthermore, if the polarity of the applied voltage is reversed, the bending will also be reversed.

第4図(a)および第4図(b)は圧電セラミックス円
柱11に交流電圧を加えた場合の振動状態の説明図であ
る。
FIGS. 4(a) and 4(b) are explanatory diagrams of the vibration state when an alternating current voltage is applied to the piezoelectric ceramic cylinder 11. FIG.

電極33.34と電極31.32間に振動子の共振周波
数に等しい交流電圧を印加した場合、第4図(a)のよ
うに白抜き矢印23の方向に屈曲振動を発生する。電極
31.34および32゜33を接続して同様に振動子の
共振周波数に等しい周波数の交流電圧を印加すると屈曲
振動の方向は第4図(a)の白抜き矢印23の方向とは
直角の方向となる。
When an AC voltage equal to the resonant frequency of the vibrator is applied between the electrodes 33, 34 and 31, 32, bending vibration is generated in the direction of the white arrow 23 as shown in FIG. 4(a). When electrodes 31, 34 and 32° 33 are connected and an alternating current voltage with a frequency equal to the resonant frequency of the vibrator is similarly applied, the direction of the bending vibration is perpendicular to the direction of the white arrow 23 in Fig. 4(a). direction.

従りて、以上の二つの方向の屈曲振動の位相を90’ず
らせること、具体的には各々の駆動電圧の印加電圧の位
相を90″ずらせることにより、圧電セラミックス円柱
11の両端部に、第4図(b)の矢印24に示すような
円運動を含む楕円運動を励起することが可能である。
Therefore, by shifting the phases of the bending vibrations in the above two directions by 90', specifically by shifting the phases of the applied voltages of each drive voltage by 90', the vibrations at both ends of the piezoelectric ceramic cylinder 11 are , it is possible to excite elliptical motion including circular motion as shown by arrow 24 in FIG. 4(b).

実際に超音波モータを構成する場合には、ローターとの
接触の効率を高めるために圧電セラミックス円柱11の
少なくとも一方の端面に金属リング10あるいは金属円
板10′を接合して圧電楕円運動振動子11′を構成す
る場合が多い。
When actually constructing an ultrasonic motor, a metal ring 10 or a metal disk 10' is bonded to at least one end face of the piezoelectric ceramic cylinder 11 to improve the efficiency of contact with the rotor, and a piezoelectric elliptic motion vibrator is formed. 11' in many cases.

第5図は本発明の超音波モータに用いる圧電楕円運動振
動子11′端面の形状の一例を示す斜視図であり、端面
の全周にわたって微小突起14及びこの微小突起の間に
、この端面から中央に向って長さ方向に沿って錐状の溝
が形成されている。
FIG. 5 is a perspective view showing an example of the shape of the end face of the piezoelectric elliptic motion vibrator 11' used in the ultrasonic motor of the present invention. A conical groove is formed along the length toward the center.

この微小突起及び溝は、金属円柱に設けられても、この
金属円柱より内側の圧電セラミックスに至るまで設けら
れても良く、要するに圧電楕円運動振動子11′の端面
から中央に向って形成されていれば良い。
These minute protrusions and grooves may be provided on the metal cylinder or may be provided all the way to the piezoelectric ceramic inside the metal cylinder, in short, they are formed from the end surface of the piezoelectric elliptic motion vibrator 11' toward the center. That's fine.

第6図は圧電楕円運動振動子11′の端部にカップ状ロ
ーラー13を組み合わせた状態を示す断面図である。
FIG. 6 is a sectional view showing a state in which a cup-shaped roller 13 is combined with the end of the piezoelectric elliptic motion vibrator 11'.

第6図に示したように、カップ状ローラー13の内壁面
は開口部の直径が前記圧電楕円運動振動子11′の端部
外径よりわずかに大きく、底部の直径が前記圧電楕円運
動振動子11′の端部外径よりわずかに小さく形成され
ている。圧電楕円運動振動子11′と振動一回転変換部
材13bは軸方向15に圧接されている。
As shown in FIG. 6, the inner wall surface of the cup-shaped roller 13 has an opening diameter slightly larger than the outer diameter of the end portion of the piezoelectric elliptic motion vibrator 11', and a bottom diameter that is slightly larger than the outer diameter of the end portion of the piezoelectric elliptic motion vibrator 11'. 11' is formed to be slightly smaller than the outer diameter of the end. The piezoelectric elliptical motion vibrator 11' and the vibration one-rotation conversion member 13b are pressed together in the axial direction 15.

第5図に示した端面形状の圧電楕円運動振動子11′を
用いた場合、圧電楕円運動振動子11′とカップ状ロー
ラー13とは錐状の微小突起14だけが接触することに
なる。したがって、圧電楕円運動振動子11′の全周に
わたって接触する場合と比較して接触によるスティフネ
スが小さくなり、圧電楕円運動振動子11′の振動に対
して負荷が軽くなり、共振周波数のずれが少なくなる。
When the piezoelectric elliptic motion vibrator 11' having the end face shape shown in FIG. 5 is used, only the conical minute protrusions 14 come into contact with the piezoelectric elliptic motion vibrator 11' and the cup-shaped roller 13. Therefore, compared to the case where the piezoelectric elliptical motion vibrator 11' is in contact with the entire circumference, the stiffness due to the contact is smaller, the load on the vibration of the piezoelectric elliptical motion vibrator 11' is lighter, and the deviation of the resonance frequency is reduced. Become.

更に、本発明によれば、圧電セラミックス円柱あるいは
圧電セラミックスバイブの側面に設けられた長さ方向に
平行な複数対の電極を有し、この圧電セラミックス円柱
の端面が円を含む楕円運動を行う圧電楕円運動振動子を
用いているため、圧電楕円運動振動子そのものは接着工
程を含まないで構成することが出来るため振動特性のば
らつきが小さい安定な楕円運動の励振が可能となる。
Further, according to the present invention, the piezoelectric ceramic cylinder has a plurality of pairs of longitudinally parallel electrodes provided on the side surfaces of the piezoelectric ceramic cylinder or the piezoelectric ceramic vibrator, and the end face of the piezoelectric ceramic cylinder moves in an elliptical motion including a circle. Since an elliptical motion vibrator is used, the piezoelectric elliptical motion vibrator itself can be constructed without any bonding process, and therefore stable elliptical motion excitation with small variations in vibration characteristics is possible.

(発明の効果) 以上示したように本発明の超音波モータにおいては、駆
動力を発生させるための振動子の形状が単純で、回転あ
るいは楕円運動振動を発生させるための二つの振動モー
ドが同じ屈曲モードであることから、構造が簡単になる
(Effects of the Invention) As shown above, in the ultrasonic motor of the present invention, the shape of the vibrator for generating driving force is simple, and the two vibration modes for generating rotational or elliptical vibration are the same. Since it is a bending mode, the structure is simple.

また、棒状の楕円運動振動子及び振動一回転変換部材を
使用しているためローターの直径即ち振動一回転変換部
材の直径を小さくすることが容易で、ローター直径の小
さい超音波モータを得ることができる。モータの直径と
しては、必要なトルクによって変わるが、原理的には1
0m+e以下も可能である。
In addition, since a rod-shaped elliptical motion vibrator and a vibration one-rotation converting member are used, it is easy to reduce the rotor diameter, that is, the diameter of the vibration one-rotation converting member, and it is possible to obtain an ultrasonic motor with a small rotor diameter. can. The diameter of the motor varies depending on the required torque, but in principle 1
0m+e or less is also possible.

また、本発明の超音波モータにおいては、圧電楕円運動
振動子の端部と振動一回転変換部材との内周面の接触が
回転軸に対して同一円周上の位置にある複数部分のみ接
触する接触部で行われ、この接触部は、内周面に対する
接触面積を小さくするようにし、て構成されているため
圧電楕円運動振動子の振動に対する影響が少なく、共振
周波数の変化などが少ない超音波モータが得られる。
Furthermore, in the ultrasonic motor of the present invention, the end portion of the piezoelectric elliptical motion vibrator and the inner circumferential surface of the vibration one-rotation conversion member are in contact only at a plurality of portions located on the same circumference with respect to the rotation axis. The contact area is designed to have a small contact area with the inner circumferential surface, so it has less influence on the vibration of the piezoelectric elliptical vibrator, and has less change in the resonant frequency. A sonic motor is obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例に係る超音波モータの構成を示
す斜視図、第2図は本発明の実施例に係る超音波モータ
に用いる圧電楕円運動振動子を示す斜視図、第3図およ
び第4図は本発明の実施例に係る超音波モータに用いる
圧電セラミックス円柱の断面図を用いて楕円運動振動子
の動作原理を説明するための説明図、第5図は本発明の
実施例に係る超音波モータに用いられる圧電楕円運動振
動子の端面形状を示す斜視図、第6図は本発明の実施例
に係る超音波モータにおいて、圧電楕円運動振動子と振
動一回転変換部材との組み合わせ状態を示す断面図、第
7図および第8図は従来の超音波モータの構造例の説明
に供する図である。 図中、10は金属リング、10′は金属円板、11は圧
電セラミックス円柱、11′は圧電楕円運動振動子、1
2はリング状支持枠、13はカップ状ローラー 13a
は駆動軸、13bは振動一回転変換部材、14は微小突
起、15はスリット、31.32.33.34は電極、
51は金属円板、52.53は圧電セラミックス円板で
ある。
FIG. 1 is a perspective view showing the configuration of an ultrasonic motor according to an embodiment of the present invention, FIG. 2 is a perspective view showing a piezoelectric elliptic motion vibrator used in the ultrasonic motor according to an embodiment of the present invention, and FIG. 4 is an explanatory diagram for explaining the operating principle of an elliptical motion vibrator using a cross-sectional view of a piezoelectric ceramic cylinder used in an ultrasonic motor according to an embodiment of the present invention, and FIG. 5 is an embodiment of the present invention. FIG. 6 is a perspective view showing the end face shape of a piezoelectric elliptic motion vibrator used in an ultrasonic motor according to an embodiment of the present invention, and FIG. 7 and 8, which are cross-sectional views showing a combined state, are diagrams for explaining a structural example of a conventional ultrasonic motor. In the figure, 10 is a metal ring, 10' is a metal disk, 11 is a piezoelectric ceramic cylinder, 11' is a piezoelectric elliptical motion vibrator, 1
2 is a ring-shaped support frame, 13 is a cup-shaped roller 13a
is a drive shaft, 13b is a vibration one-rotation conversion member, 14 is a minute projection, 15 is a slit, 31, 32, 33, 34 is an electrode,
51 is a metal disk, and 52 and 53 are piezoelectric ceramic disks.

Claims (1)

【特許請求の範囲】[Claims] 1.楕円運動振動を行う端部を有する圧電楕円運動振動
子と前記端部を覆うように内周面で接触して配され、前
記楕円運動振動を回転軸の回りの回転運動に変換する振
動一回転変換部材とを有する超音波モータにおいて、前
記端部は、前記内周面のうち、前記回転軸に対して、同
一円周上の位置にある複数の部分のみ接触する接触部を
有し、前記内周面に対する接触面積を小さくするように
したことを特徴とする超音波モータ。
1. A piezoelectric elliptical motion vibrator having an end portion that performs elliptical motion vibration, and a piezoelectric elliptical motion vibrator disposed in contact with the inner peripheral surface so as to cover the end portion, and converting the elliptic motion vibration into rotational motion around a rotation axis. In the ultrasonic motor having a conversion member, the end portion has a contact portion that contacts only a plurality of portions of the inner circumferential surface that are located on the same circumference with respect to the rotation shaft, and An ultrasonic motor characterized by having a small contact area with an inner peripheral surface.
JP1083918A 1989-04-04 1989-04-04 Ultrasonic motor Expired - Fee Related JP2549309B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1083918A JP2549309B2 (en) 1989-04-04 1989-04-04 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1083918A JP2549309B2 (en) 1989-04-04 1989-04-04 Ultrasonic motor

Publications (2)

Publication Number Publication Date
JPH02266876A true JPH02266876A (en) 1990-10-31
JP2549309B2 JP2549309B2 (en) 1996-10-30

Family

ID=13815982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1083918A Expired - Fee Related JP2549309B2 (en) 1989-04-04 1989-04-04 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JP2549309B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100691270B1 (en) * 2005-08-05 2007-03-12 삼성전기주식회사 Supporting Structure For Finding the Nodal Point on the Piezoelectric Stator Automatically

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100691270B1 (en) * 2005-08-05 2007-03-12 삼성전기주식회사 Supporting Structure For Finding the Nodal Point on the Piezoelectric Stator Automatically

Also Published As

Publication number Publication date
JP2549309B2 (en) 1996-10-30

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