JPH0226249U - - Google Patents

Info

Publication number
JPH0226249U
JPH0226249U JP10523388U JP10523388U JPH0226249U JP H0226249 U JPH0226249 U JP H0226249U JP 10523388 U JP10523388 U JP 10523388U JP 10523388 U JP10523388 U JP 10523388U JP H0226249 U JPH0226249 U JP H0226249U
Authority
JP
Japan
Prior art keywords
wafer
carrier body
fits
holds
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10523388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10523388U priority Critical patent/JPH0226249U/ja
Publication of JPH0226249U publication Critical patent/JPH0226249U/ja
Pending legal-status Critical Current

Links

JP10523388U 1988-08-09 1988-08-09 Pending JPH0226249U (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10523388U JPH0226249U (US07166745-20070123-C00016.png) 1988-08-09 1988-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10523388U JPH0226249U (US07166745-20070123-C00016.png) 1988-08-09 1988-08-09

Publications (1)

Publication Number Publication Date
JPH0226249U true JPH0226249U (US07166745-20070123-C00016.png) 1990-02-21

Family

ID=31337662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10523388U Pending JPH0226249U (US07166745-20070123-C00016.png) 1988-08-09 1988-08-09

Country Status (1)

Country Link
JP (1) JPH0226249U (US07166745-20070123-C00016.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018214068B4 (de) 2017-11-10 2022-10-20 Mitsubishi Electric Corporation Waferbehälter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018214068B4 (de) 2017-11-10 2022-10-20 Mitsubishi Electric Corporation Waferbehälter

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