JPH0226227U - - Google Patents

Info

Publication number

JPH0226227U

JPH0226227U JP10363688U JP10363688U JPH0226227U JP H0226227 U JPH0226227 U JP H0226227U JP 10363688 U JP10363688 U JP 10363688U JP 10363688 U JP10363688 U JP 10363688U JP H0226227 U JPH0226227 U JP H0226227U

Authority

JP

Japan

Prior art keywords

dust collection

semiconductor manufacturing

manufacturing equipment

collection cylinder

electrode plate

Prior art date

1988-08-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000428 dust Substances 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000004140 cleaning Methods 0.000 claims 1
• 239000012212 insulator Substances 0.000 claims 1
• 239000000463 material Substances 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1