JPH02258971A - 真空蒸着源 - Google Patents

真空蒸着源

Info

Publication number
JPH02258971A
JPH02258971A JP28751089A JP28751089A JPH02258971A JP H02258971 A JPH02258971 A JP H02258971A JP 28751089 A JP28751089 A JP 28751089A JP 28751089 A JP28751089 A JP 28751089A JP H02258971 A JPH02258971 A JP H02258971A
Authority
JP
Japan
Prior art keywords
vapor
evaporation source
evaporation
film thickness
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28751089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0524229B2 (cs
Inventor
Takashi Noji
隆司 野地
Masahiro Sugiyama
正弘 杉山
Shigeharu Kawamura
重治 河村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP28751089A priority Critical patent/JPH02258971A/ja
Publication of JPH02258971A publication Critical patent/JPH02258971A/ja
Publication of JPH0524229B2 publication Critical patent/JPH0524229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP28751089A 1989-11-06 1989-11-06 真空蒸着源 Granted JPH02258971A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28751089A JPH02258971A (ja) 1989-11-06 1989-11-06 真空蒸着源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28751089A JPH02258971A (ja) 1989-11-06 1989-11-06 真空蒸着源

Publications (2)

Publication Number Publication Date
JPH02258971A true JPH02258971A (ja) 1990-10-19
JPH0524229B2 JPH0524229B2 (cs) 1993-04-07

Family

ID=17718275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28751089A Granted JPH02258971A (ja) 1989-11-06 1989-11-06 真空蒸着源

Country Status (1)

Country Link
JP (1) JPH02258971A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020089288A (ko) * 2002-11-07 2002-11-29 정세영 유기물 증착용 소스
EP1342808A1 (en) * 2002-03-08 2003-09-10 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
JP2007005249A (ja) * 2005-06-27 2007-01-11 Matsushita Electric Works Ltd 有機ｅｌ素子の製造方法及び製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1342808A1 (en) * 2002-03-08 2003-09-10 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
KR20020089288A (ko) * 2002-11-07 2002-11-29 정세영 유기물 증착용 소스
JP2007005249A (ja) * 2005-06-27 2007-01-11 Matsushita Electric Works Ltd 有機ｅｌ素子の製造方法及び製造装置

Also Published As

Publication number Publication date
JPH0524229B2 (cs) 1993-04-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term