JPH0220971B2 - - Google Patents

Info

Publication number
JPH0220971B2
JPH0220971B2 JP13095180A JP13095180A JPH0220971B2 JP H0220971 B2 JPH0220971 B2 JP H0220971B2 JP 13095180 A JP13095180 A JP 13095180A JP 13095180 A JP13095180 A JP 13095180A JP H0220971 B2 JPH0220971 B2 JP H0220971B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13095180A
Other versions
JPS5754939A (en )
Inventor
Seiji Oonaka
Kosei Kajiwara
Hiroshi Komeno
Kazutoshi Nagano
Kosuke Yasuno
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
JP13095180A 1980-09-19 1980-09-19 Expired - Lifetime JPH0220971B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13095180A JPH0220971B2 (en) 1980-09-19 1980-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13095180A JPH0220971B2 (en) 1980-09-19 1980-09-19

Publications (2)

Publication Number Publication Date
JPS5754939A true JPS5754939A (en) 1982-04-01
JPH0220971B2 true JPH0220971B2 (en) 1990-05-11

Family

ID=15046455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13095180A Expired - Lifetime JPH0220971B2 (en) 1980-09-19 1980-09-19

Country Status (1)

Country Link
JP (1) JPH0220971B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3374452D1 (en) * 1982-04-05 1987-12-17 Ibm Method of increasing the image resolution of a transmitting mask and improved masks for performing the method
WO1984003571A1 (en) * 1983-03-01 1984-09-13 Oesterr Forsch Seibersdorf Optical structure filter and production method thereof
JP2710967B2 (en) * 1988-11-22 1998-02-10 株式会社日立製作所 Method of fabricating an integrated circuit device
JP2783582B2 (en) * 1989-03-22 1998-08-06 株式会社東芝 Photomask
JP2786693B2 (en) * 1989-10-02 1998-08-13 株式会社日立製作所 Method of manufacturing a mask
US9046783B2 (en) 2012-03-27 2015-06-02 Panasonic Intellectual Property Management Co., Ltd. Photomask, and pattern formation method and exposure apparatus using the photomask

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861157A (en) * 1971-12-01 1973-08-27
JPS4877850A (en) * 1972-01-18 1973-10-19
JPS5097276A (en) * 1973-12-25 1975-08-02

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861157A (en) * 1971-12-01 1973-08-27
JPS4877850A (en) * 1972-01-18 1973-10-19
JPS5097276A (en) * 1973-12-25 1975-08-02

Also Published As

Publication number Publication date Type
JPS5754939A (en) 1982-04-01 application

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